Tube Furnace (Tystar 8300)

Tube Furnace (Tystar 8300) Tool Type Thermal Processing Location Bay 4 Supervisor Tony Bosch Supervisor Phone (805) 893-3486 Supervisor E-Mail bosch@ece.ucsb.edu Description Tystar 8" 3-Tube Oxidation/Annealing System Manufacturer Tystar Corporation Sign up for this tool

About

The three stack Tystar 8” furnace is used primarily for 3 processes. The processes are dedicated for one tube each:

1. SOG curing - Tube 1
2. Dry or wet oxidation of silicon - Tubes 2 and 3
3. General furnace annealing - Tube 3

Each process tube can accomodate up to one hundred 8” wafers per cycle. We have boats for 2", 3", 4", 6", 8" and irregular shaped pieces. The maximum temperature is 1050°C for the system. Gases used are O₂, Steam from DI-H₂O, N₂.

Process Information

Use the BYU Thermal Oxidation Calculator to determine the time and temperature that will be necessary for your process needs. Keep in mind that all process must be 30 minutes in length at a minimum. Processes less than 30 minutes will suffer from poor uniformity because the process tube will not have sufficient time to saturate with O2 or steam.

http://www.cleanroom.byu.edu/OxideTimeCalc.phtml

Recipes

Tube 1 - SOG425.001

Tube 2 - WET1050.002, DRY1050.002, WETVAR.002, DRYVAR.002

Tube 3 - WET1050.003, DRY1050.003, WETVAR.003, DRYVAR.003, ANNEAL.003

Useful Information

Tystar Wafer Boat Drawing - 4" Wafer with 0.5mm Slots

See Also

• Tystar - Manufacturer of the tool
• Silicon Thermal Oxide Thickness Calculator - Use this on-line calculator to calculate times for silicon oxidation.