Thermal Evaporation Recipes: Difference between revisions

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=Thermal Evaporator 1=
=Thermal Evaporator 1=
= Materials Table =
= Materials Table =

{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible collapsed wikitable"
|-
! colspan=8 width=1300 height=35 bgcolor="#D0E7FF" align="center"|<div style="font-size: 150%;">Materials Table</div>
|- bgcolor="#D0E7FF"
! width="45" bgcolor="#D0E7FF" align="center" | '''Material'''
! width="45" bgcolor="#D0E7FF" align="center" | '''Symbol'''
! width="45" bgcolor="#D0E7FF" align="center" | '''Density, g/cm3'''
! width="45" bgcolor="#D0E7FF" align="center" | '''Z Ratio'''
! width="45" bgcolor="#D0E7FF" align="center" | '''Tooling, %'''
! width="45" bgcolor="#D0E7FF" align="center" | '''Current, Amp'''
! width="45" bgcolor="#D0E7FF" align="center" | '''Dep.rate, A/sec'''
! width="100" bgcolor="#D0E7FF" align="center" | '''Comments'''
|-
|Aluminum
|Al
|2.70
|8.17
|95
|85
|1
|Used often
|-
|Chromium
|Cr
| 7.20
| 28.95
|95
|85
|2
|Used often
|-
|Cobalt
|Co
|8.71
|25.74
|
|
|
|
|-
|Copper
|Cu
|8.93
|20.21
|100
|
|
|Used often
|-
|Gold
|Au
|19.32
|23.18
|101.2
|122
|5
|Used often
|-
|Gold/Palladium
|Au.5/Pd.5
|15.86
|23.96
|
|
|
|
|-
|Gold/Palladium
|Au.5/Pd.4
|16.40
|23.80
|
|
|
|
|-
|Gold/Zinc
|Au.95/Zn.05
|18.72
|22.89
|101.2
|
|
|
|-
|Gold/Zinc
|Au.90/Zn.10
|18.07
|22.58
|
|
|
|
|-
|Magnezium
|Mg
|1.74
|5.48
|98.4
|
|
|
|-
|Manganese
|Mn
|7.20
|23.40
|120
|100
|
|
|-
|Nickel
|Ni
|8.90
|26.68
|100
|50
|4.5
|Used often
|-
|Nichrome
|NiCr
|8.32
|27.59
|
|100
|0.4
|
|-
|Palladium
|Pd
|12.40
|24.73
|140.5
|62
|1.5
|Used often
|-
|Silicon Monoxide
|SiO
|2.13
|10.19
|120
|70
|
|
|-
|Silver
|Ag
|10.5
|16.69
|
|
|
|
|-
|Zinc
|Zn
|7.14
|17.18
|
|50
|4.5
|Used often
|-
|Zinc Oxide
|ZnO
|5.61
|15.88
|
|
|
|
|-
|StrontiumFluoride
|SrF<sub>2
|4.28
|12.15
|200
|
|
|
|-
|Iron
|Fe
|7.86
|25.30
|
|
|
|
|-
|ITO(IndiumTinOxide)
|In<sub>2</sub>O<sub>3</sub> - SnO<sub>2</sub>
|6.43-7.14
|0.841
|
|
|
|
|-
|Permalloy
|Ni<sub>0.1</sub>Fe<sub>0.2
|8.7
|26.40
|
|140
|0.1
|
|-

Revision as of 20:54, 31 March 2014

Back to Vacuum Deposition Recipes.

Thermal Evaporator 1

Materials Table

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