Thermal Evaporation Recipes: Difference between revisions

From UCSB Nanofab Wiki
Jump to navigation Jump to search
No edit summary
Line 217: Line 217:


=[[Thermal Evaporator 2]]=
=[[Thermal Evaporator 2]]=
= Materials Table =

{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible collapsed wikitable"
|-
! colspan=6 width=1300 height=35 bgcolor="#D0E7FF" align="center"|<div style="font-size: 150%;">Materials Table</div>
|- bgcolor="#D0E7FF"
! width="45" bgcolor="#D0E7FF" align="center" | '''Material'''
! width="45" bgcolor="#D0E7FF" align="center" | '''Symbol'''
! width="45" bgcolor="#D0E7FF" align="center" | '''Density, g/cm3'''
! width="45" bgcolor="#D0E7FF" align="center" | '''Z Ratio'''
! width="45" bgcolor="#D0E7FF" align="center" | '''Tooling, %'''
! width="100" bgcolor="#D0E7FF" align="center" | '''Comments'''
|-
|Aluminum
|Al
|2.70
|1.08
|
|
|-
|Antimony
|Sb
|6.620
|0.768
|
|
|-
|Arsenic
|As
|5.73
|0.996
|
|
|-
|Beryllium
|Be
|1.85
|0.543
|
|
|-
|Boron
|B
|2.54
|0.389
|
|
|-
|Cadmium
|Cd
|8.64
|0.682
|
|
|-
|Cadmium sulfide
|CdS
|4.83
|1.02
|
|
|-
|Cadmium telluride
|CdTe
|5.85
|0.980
|
|
|-
|Calcium fluoride
|CaF<sub>2</sub>
|3.18
|0.775
|
|Used often
|-
|Carbon (graphite)
|C
|2.25
|3.26
|
|
|-
|Chromium
|Cr
|7.20
|0.305
|155
|Used often
|-
|Cobalt
|Co
|8.71
|0.343
|
|
|-
|Copper
|Cu
|8.93
|0.437
|
|
|-
|Gallium
|Ga
|5.93
|0.593
|
|
|-
|Gallium Arsenide
|GaAs
|5.31
|1.59
|
|
|-
|Germanium
|Ge
|5.35
|0.516
|
|
|-
|Gold
|Au
|19.30
|0.381
|
|Used often
|-
|Indium
|In
|7.30
|0.841
|120
|Used often
|-
|Indium antimonide
|InSb
|5.76
|0.769
|
|
|-
|Iridium
|Ir
|22.4
|0.129
|
|
|-
|Iron
|Fe
|7.86
|0.349
|
|
|-
|Lead
|Pb
|11.3
|1.13
|
|
|-
|Lead sulfide
|PbS
|7.50
|0.566
|
|
|-
|Lithium fluoride
|LiF
|2.638
|0.778
|
|
|-
|Magnesium
|Mg
|1.74
|1.61
|
|
|-
|Magnesium oxide
|MgO
|3.58
|0.411
|
|
|-
|Magnesium Fluoride
|MgF<sub>2</sub>
|3.00 ( should be 3.18)
|0.427( should be 0.637)
|
|
|-
|Manganese
|Mn
|7.20
|0.377
|
|
|-
|Manganese(II) Sulfide
|MnS
|3.99
|0.94
|
|
|-
|Mercury
|Hg
|13.46
|0.74
|
|
|-
|Molybdenum
|Mo
|10.2
|0.257
|
|
|-
|Nickel
|Ni
|8.91
|0.331
|
|Used often
|-
|Niobium
|Nb
|8.578
|0.492
|
|
|-
|Niobium(V) Oxide
|Nb<sub>2</sub>O<sub>5</sub>
|4.47
|*1.00
|
|*z ratio has not been established
|-
|Palladium
|Pd
|12.0
|0.357
|
|
|-
|Platinum
|Pt
|21.4
|0.245
|
|
|-
|Potasium Cloride
|KCl
|1.98
|2.05
|
|
|-
|Selenium
|Se
|4.82
|0.864
|
|
|-
|Silicon
|Si
|2.32
|0.712
|
|
|-
|Silicon(II) Oxide
|SiO
|2.13
|0.87
|
|
|-
|Silicon dioxide (fused quarz)
|SiO<sub>2</sub>
|2.20
|1.07
|
|
|-
|Silver
|Ag
|10.5
|0.529
|
|
|-
|Silver bromide
|AgBr
|6.47
|1.18
|
|
|-
|Silver chloride
|AgCl
|5.56
|1.32
|
|
|-
|Sodium
|Na
|0.97
|4.8
|
|
|-
|Sodium chloride
|NaCl
|2.17
|1.57
|
|
|-
|Tantalum
|Ta
|16.6
|0.262
|
|
|-
|Tantalum(IV) oxide
|Ta<sub>2</sub>O<sub>5</sub>
|8.2
|0.30
|
|
|-
|Tin
|Sn
|7.30
|0.724
|
|Used often
|-
|Titanium
|Ti
|4.50
|0.628
|
|Used often
|-
|Titanium (IV) Oxide
|TiO<sub>2</sub>
|4.26
|0.40
|
|
|-
|Titanium Oxide
|TiO
|4.90
|*1.00
|
|* z ratio not established
|-
|Tungsten
|W
|19.3
|0.163
|
|
|-
|Tungsten carbide
|WC
|15.6
|0.151
|
|
|-
|Zinc
|Zn
|7.04
|0.514
|
|Used often
|-
|Zinc Oxide
|ZnO
|5.61
|0.556
|
|
|-
|Zinc Sulfide
|ZnS
|4.09
|0.775
|
|
|-
|Zirconium
|Zr
|6.51
|0.60
|
|Should be 6.49
|-
|Zirconium Oxide
|ZrO<sub>2</sub>
|5.6
|1.001
|
|
|-

Revision as of 21:25, 31 March 2014

Back to Vacuum Deposition Recipes.

Thermal Evaporator 1

Materials Table

Thermal Evaporator 2

Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=Thermal_Evaporation_Recipes&oldid=3782"