PECVD1 Recipes: Difference between revisions
Jump to navigation
Jump to search
| Line 12: | Line 12: | ||
== Other recipes (PECVD#1)== |
== Other recipes (PECVD#1)== |
||
* |
|||
* [[media:PECVD1-SiON-Recipe.pdf|Low Stress Si<sub>3</sub>N<sub>4</sub> - Variable Stress Recipes]] |
|||
* [[media:PECVD1-SiON-Recipe.pdf|Low Stress Si<sub>3</sub>N<sub>4</sub> - Variable Stress Plot]] |
|||
*[[media:PECVD1-LS SION-recipe2014 LS SION recipe.pdf|SiO<sub>x</sub>N<sub>y</sub> Recipe]] |
*[[media:PECVD1-LS SION-recipe2014 LS SION recipe.pdf|SiO<sub>x</sub>N<sub>y</sub> Recipe]] |
||
*[https://docs.google.com/spreadsheets/d/1rixyzAAq6q08M5OwvZiDVoh3K8B566XKM-UZAQIAnsg/edit#gid=sharing SiO<sub>x</sub>N<sub>y</sub> Data 2014] |
*[https://docs.google.com/spreadsheets/d/1rixyzAAq6q08M5OwvZiDVoh3K8B566XKM-UZAQIAnsg/edit#gid=sharing SiO<sub>x</sub>N<sub>y</sub> Data 2014] |
||
*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dEttR2JSTkRoamR0SUZ4bE5QUW9uS2c&usp=sharing SiO<sub>x</sub>N<sub>y</sub> 3000A Thickness uniformity 2014] |
*[https://docs.google.com/spreadsheet/ccc?key=0AnwBU1s4JQo2dEttR2JSTkRoamR0SUZ4bE5QUW9uS2c&usp=sharing SiO<sub>x</sub>N<sub>y</sub> 3000A Thickness uniformity 2014] |
||
*[[media:PECVD1-LS SION-recipe2014 LS SION recipe.pdf|LS SiN Recipe]] |
*[[media:PECVD1-LS SION-recipe2014 LS SION recipe.pdf|LS SiN Recipe]] |
||
*[https://docs.google.com/spreadsheets/d/1Joz0az9TGZWQc4CiMQJZzLBbNFbx_hH2Oc0B4NNJmYk/edit#gid=978933038=sharing LS SiN Data 2014] |
*[https://docs.google.com/spreadsheets/d/1Joz0az9TGZWQc4CiMQJZzLBbNFbx_hH2Oc0B4NNJmYk/edit#gid=978933038=sharing LS SiN Data 2014] |
||