RIE Etching Recipes: Difference between revisions
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==CdZnTe Etching (RIE 2)== |
==CdZnTe Etching (RIE 2)== |
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*[[media:11-CZT_etching-1.pdf|CdZnTe Etch Recipes - CH<sub>4</sub>-H<sub>2</sub>-Ar]] |
*[[media:11-CZT_etching-1.pdf|CdZnTe Etch Recipes - CH<sub>4</sub>-H<sub>2</sub>-Ar]] |
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==ZnS Etching (RIE 2)== |
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*[[media:|CdZnTe Etch Recipes - CH<sub>4</sub>-H<sub>2</sub>-Ar]] |
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==ITO Etching (RIE 2)== |
==ITO Etching (RIE 2)== |
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Revision as of 17:05, 29 July 2016
Back to Dry Etching Recipes.
RIE 1 (Custom)
RIE 2 (MRC)
CdZnTe Etching (RIE 2)
ZnS Etching (RIE 2)
- [[media:|CdZnTe Etch Recipes - CH4-H2-Ar]]