Spin Rinse Dryer (SemiTool): Difference between revisions
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Two Spin-Rinse Dryers are available, one for 4-inch wafers and one for 6-inch wafers. |
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Each has a dedicated cassette that can hold up to 25 wafers. |
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The tool is set up to rinse at ~1000 rpm while spraying DI water, and then Dry in nitrogen at ~2000 rpm. A "Dry Only" option is also available. |
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{{tool|{{PAGENAME}} |
{{tool|{{PAGENAME}} |
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|picture=SpinRinse.jpg |
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Revision as of 00:13, 8 September 2017
Two Spin-Rinse Dryers are available, one for 4-inch wafers and one for 6-inch wafers.
Each has a dedicated cassette that can hold up to 25 wafers.
The tool is set up to rinse at ~1000 rpm while spraying DI water, and then Dry in nitrogen at ~2000 rpm. A "Dry Only" option is also available.
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