Microscopes: Difference between revisions

From UCSB Nanofab Wiki
Jump to navigation Jump to search
(updates on ProgRes/LEXT/DUV to specify user-editable vs. locked calibrations)
Line 14: Line 14:
=== Microscope #2: (Bay 7) ===
=== Microscope #2: (Bay 7) ===
* Trinocular: Ocular Binoc. + Camera (Simultaneous)
* Trinocular: Ocular Binoc. + Camera (Simultaneous)
* ProgRes video/photo capture & measurement
* ProgRes video/photo capture & user-editable calibrated measurement
* Objectives: 5x, 10x, 20x, 50x, 100x, 150x
* Objectives: 5x, 10x, 20x, 50x, 100x, 150x
* Filters: Green, ND
* Filters: Green, ND
Line 25: Line 25:
* [https://www.nanotech.ucsb.edu/wiki/images/8/80/Nikon-Microscope-Manual.pdf Manual for Nikon Eclipse L200D]
* [https://www.nanotech.ucsb.edu/wiki/images/8/80/Nikon-Microscope-Manual.pdf Manual for Nikon Eclipse L200D]
* Trinocular: Binoc. + Camera (Mutually Exclusive)
* Trinocular: Binoc. + Camera (Mutually Exclusive)
* ProgRes video/photo capture & measurement
* ProgRes video/photo capture & user-editable calibrated measurement
* Objectives: 5x, 10x, 20x, 50x, 100x, 150x
* Objectives: 5x, 10x, 20x, 50x, 100x, 150x
* Filters: Green, ND
* Filters: Green, ND
Line 34: Line 34:
=== Microscope #4: (Bay 6) ===
=== Microscope #4: (Bay 6) ===
* Trinocular: Binoc. + Camera (Mutually Exclusive)
* Trinocular: Binoc. + Camera (Mutually Exclusive)
* ProgRes video/photo capture & measurement
* ProgRes video/photo capture & user-editable calibrated measurement
* Objectives: 5x, 10x, 20x, 50x, 100x, 150x
* Objectives: 5x, 10x, 20x, 50x, 100x, 150x
* Filters: Green, ND
* Filters: Green, ND
Line 47: Line 47:


=== [[Fluorescence Microscope (Olympus MX51)|Fluorescence Microscope: Olympus MX51 (Bay 6)]] ===
=== [[Fluorescence Microscope (Olympus MX51)|Fluorescence Microscope: Olympus MX51 (Bay 6)]] ===
* See the wiki page for the [[Fluorescence Microscope (Olympus MX51)|Olympus MX51]]
* See the wiki page for the [[Fluorescence Microscope (Olympus MX51)|Olympus MX51]] for full details
* Trinocular: Binoc. + Camera (Simultaneous)
* Trinocular: Binoc. + Camera (Simultaneous)
* Native Olympus Stream Software:
* Native photo/video capture & calibrated measurement
** Photo/video capture
** Calibrated measurement (calibrations locked)
* Objectives: 5x, 10x, 20x, 50x, 100x, 150x
* Objectives: 5x, 10x, 20x, 50x, 100x, 150x
* Filters: Green, ND
* Filters: Green, ND
Line 55: Line 57:
* Differential Interference Contrast (DIC/Nomarski)
* Differential Interference Contrast (DIC/Nomarski)
* Top/Bottom Illumination
* Top/Bottom Illumination
* Three Fluorescence Filters
* Three Fluorescence Filters (requires training, see main tool page for specs.)


=== [[Deep UV Optical Microscope (Olympus)|DUV Microscope: Olympus MX61A-DUV (Bay 7)]] ===
=== [[Deep UV Optical Microscope (Olympus)|DUV Microscope: Olympus MX61A-DUV (Bay 7)]] ===
Please see the [[Deep UV Optical Microscope (Olympus)|main Tool page]] for detailed info on this microscope.
''Motorized Stage/Turret, Software control with Calibrated measurements, Deep-UV Light source+Camera for DUV-100x high res. imaging/measurement.''
YOU ARE REQUIRED TO GET TRAINED on this tool before you are allowed to use it! Please contact the Tool Owner to get training.
* Motorized Stage + Turret
* Trinocular: Binoc. + Camera (Simultaneous)
* Objectives: 5x, 10x, 20, 50x, 100x, DUV-100x
* Filters: ''to be added''
* Native Olympus Software control with Calibrated measurements
* Deep-UV Light source + DUV Camera for DUV-100x sub-micron imaging/measurement


== [[Laser Scanning Confocal M-scope (Olympus LEXT)|Olympus LEXT Confocal Microscope]] ==
== [[Laser Scanning Confocal M-scope (Olympus LEXT)|Olympus LEXT Confocal Microscope]] ==
See the main tool page for complete info: [[Laser Scanning Confocal M-scope (Olympus LEXT)]]
YOU ARE REQUIRED TO GET TRAINED on this tool before you are allowed to use it! Please contact the Tool Owner to get training.
YOU ARE REQUIRED TO GET TRAINED on this tool before you are allowed to use it! Please contact the Tool Owner to get training.
* Motorized stage + Objective Turret
The LEXT has a motorized stage, image stitching capabilities and some image measurement capabilities, in addition to the primary topographical measurement capabilities afforded by the laser-scanning confocal microscopy function.
* 100mm wafer stage

* Native Olympus OLS2000 Software:
See the main tool page for more info: [[Laser Scanning Confocal M-scope (Olympus LEXT)]]
** Calibrated measurement (calibrations locked)
** Image stitching capabilities
* 3D Topographical measurement capabilities via laser-scanning confocal microscopy function
* Surface roughness estimations (large roughness)
* Thin-Film Film-Thickness Measurements (thicker films)


==Documentation==
==Documentation==

Revision as of 17:16, 10 May 2019

Microscopes
Microscopes.jpg
Tool Type Inspection, Test and Characterization
Location Bay 3, 6 & 7
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail bosch@ece.ucsb.edu
Description Optical Microscopes
Manufacturer Nikon (3) & Olympus (1)


Nikon

The lab currently has 3 Nikon Microscopes (Microscopes #2, #3 & #4). These are located in bays 6 and 7.

The scopes are connected to computers via Jenoptik ProgRes software which allows users to digitally capture images through the microscope and make calibrated measurements.

Microscope #2: (Bay 7)

  • Trinocular: Ocular Binoc. + Camera (Simultaneous)
  • ProgRes video/photo capture & user-editable calibrated measurement
  • Objectives: 5x, 10x, 20x, 50x, 100x, 150x
  • Filters: Green, ND
  • Bright/Dark Field
  • Differential Interference Contrast (DIC/Nomarski)
    • The DIC prism is installed on each objective and can't be removed, so even regular microscope images suffer from a slight double-image
  • Top Illumination

Microscope #3: Eclipse Nikon L200D (Bay 6)

  • Manual for Nikon Eclipse L200D
  • Trinocular: Binoc. + Camera (Mutually Exclusive)
  • ProgRes video/photo capture & user-editable calibrated measurement
  • Objectives: 5x, 10x, 20x, 50x, 100x, 150x
  • Filters: Green, ND
  • Bright/Dark Field
  • Differential Interference Contrast (DIC/Nomarski)
  • Top Illumination

Microscope #4: (Bay 6)

  • Trinocular: Binoc. + Camera (Mutually Exclusive)
  • ProgRes video/photo capture & user-editable calibrated measurement
  • Objectives: 5x, 10x, 20x, 50x, 100x, 150x
  • Filters: Green, ND
  • Bright/Dark Field
  • Differential Interference Contrast (DIC/Nomarski)
  • Top/Bottom Illumination

Olympus

Microscope #1: Olympus Optiphot-2 (Bay 3)

  • To be added

Fluorescence Microscope: Olympus MX51 (Bay 6)

  • See the wiki page for the Olympus MX51 for full details
  • Trinocular: Binoc. + Camera (Simultaneous)
  • Native Olympus Stream Software:
    • Photo/video capture
    • Calibrated measurement (calibrations locked)
  • Objectives: 5x, 10x, 20x, 50x, 100x, 150x
  • Filters: Green, ND
  • Bright/Dark Field
  • Differential Interference Contrast (DIC/Nomarski)
  • Top/Bottom Illumination
  • Three Fluorescence Filters (requires training, see main tool page for specs.)

DUV Microscope: Olympus MX61A-DUV (Bay 7)

Please see the main Tool page for detailed info on this microscope.

YOU ARE REQUIRED TO GET TRAINED on this tool before you are allowed to use it! Please contact the Tool Owner to get training.
  • Motorized Stage + Turret
  • Trinocular: Binoc. + Camera (Simultaneous)
  • Objectives: 5x, 10x, 20, 50x, 100x, DUV-100x
  • Filters: to be added
  • Native Olympus Software control with Calibrated measurements
  • Deep-UV Light source + DUV Camera for DUV-100x sub-micron imaging/measurement

Olympus LEXT Confocal Microscope

See the main tool page for complete info: Laser Scanning Confocal M-scope (Olympus LEXT)

YOU ARE REQUIRED TO GET TRAINED on this tool before you are allowed to use it! Please contact the Tool Owner to get training.
  • Motorized stage + Objective Turret
  • 100mm wafer stage
  • Native Olympus OLS2000 Software:
    • Calibrated measurement (calibrations locked)
    • Image stitching capabilities
  • 3D Topographical measurement capabilities via laser-scanning confocal microscopy function
  • Surface roughness estimations (large roughness)
  • Thin-Film Film-Thickness Measurements (thicker films)

Documentation