Deep UV Optical Microscope (Olympus): Difference between revisions
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|model= MX61A-DUV |
|model= MX61A-DUV |
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= About = |
== About == |
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This system does general purpose imaging in the visible and also has high resolution/high magnification DUV imaging using 250 nm light. Surface features less than 100nm can be resolved. |
This system does general purpose imaging in the visible and also has high resolution/high magnification DUV imaging using 250 nm light. Surface features less than 100nm can be resolved. |
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A Good system for CD measurements on wafer (250nm and above) without entry into the SEM. |
A Good system for CD measurements on wafer (250nm and above) without entry into the SEM. |
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== Detailed Specifications == |
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* Microscope Objectives: |
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** 5x, 10x, 20x, 50x, 100x, DUV-100x |
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* Software Control: |
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** Motorized Stage & Objective Turret |
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** Calibrated Measurements (calibrations fixed) |
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** Z-motor (focus height) measurement |
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* Filters: |
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** Bright Field / Dark Field (visible only) |
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== Examples == |
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[[File:Olympus MX61A-DUV res test 100x DUV v1.png|alt=DUV microscope image with 1µm scale bar|none|thumb|504x504px|100x DUV image taken with the Olympus MX61A-DUV, showing sub-micron resolution.]] |
[[File:Olympus MX61A-DUV res test 100x DUV v1.png|alt=DUV microscope image with 1µm scale bar|none|thumb|504x504px|100x DUV image taken with the Olympus MX61A-DUV, showing sub-micron resolution.]] |
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Revision as of 17:46, 26 June 2019
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About
This system does general purpose imaging in the visible and also has high resolution/high magnification DUV imaging using 250 nm light. Surface features less than 100nm can be resolved.
The system has precision motorized stage control and is fully computer controlled for image capture and sample manipulation.
A Good system for CD measurements on wafer (250nm and above) without entry into the SEM.
Detailed Specifications
- Microscope Objectives:
- 5x, 10x, 20x, 50x, 100x, DUV-100x
- Software Control:
- Motorized Stage & Objective Turret
- Calibrated Measurements (calibrations fixed)
- Z-motor (focus height) measurement
- Filters:
- Bright Field / Dark Field (visible only)
