Wafer Coating Process Traveler: Difference between revisions
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(Replaced content with "There are three standard recipes : STD SiO2, STD Nitride2, and STD LS Nitride2 at 300C. Instructions bellow explain how to run each of the recipes ( seasoning, deposition,...") Tags: Replaced Visual edit |
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==== Standard nitride deposition ==== |
==== Standard nitride deposition ==== |
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=== STD LS Nitride2 |
=== STD LS Nitride2 === |
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==== Standard low stress nitride deposition ==== |
==== Standard low stress nitride deposition ==== |
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Revision as of 23:43, 22 April 2020
There are three standard recipes : STD SiO2, STD Nitride2, and STD LS Nitride2 at 300C. Instructions bellow explain how to run each of the recipes ( seasoning, deposition, cleaning)