Dry Etching Recipes: Difference between revisions
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|{{rl|ICP Etching Recipes|GaN Etch (Panasonic 1)}} |
|{{rl|ICP Etching Recipes|GaN Etch (Panasonic 1)}} |
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|{{rl|ICP Etching Recipes|GaN Etch (Unaxis VLR)}} |
|{{rl|ICP Etching Recipes|GaN Etch (Unaxis VLR)}} |
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Revision as of 00:43, 13 April 2022
- R = Recipe is available. Clicking this link will take you to the recipe.
- A = Material is available for use, but no recipes are provided.