Tube Furnace (Tystar 8300): Difference between revisions

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== About ==
==About==
The three stack Tystar 8” furnace is used primarily for 3 processes. The processes are dedicated for specific tubes as follows:
The three stack Tystar 8” furnace is used primarily for 3 processes. The processes are dedicated for specific tubes as follows:

* '''Tube #1''': SOG curing & low-temp oxidation
* '''Tubes #2 and #3''': Dry or wet oxidation of silicon (unprocessed, clean)
*'''Tube #1''': SOG curing & low-temp oxidation
* '''Tube #3''': General furnace annealing & oxidation, including processed material
*'''Tubes #2 and #3''': Dry or wet oxidation of silicon (unprocessed, clean)
*'''Tube #3''': General furnace annealing & oxidation, including processed material


Each process tube can accomodate up to one hundred 8” wafers per cycle. We have boats for 2", 3", 4", 6", 8" and irregular shaped pieces. The maximum temperature is 1100°C for the system. Gases used are O<sub>2</sub>, Steam from DI-H<sub>2</sub>O, N<sub>2</sub>.
Each process tube can accomodate up to one hundred 8” wafers per cycle. We have boats for 2", 3", 4", 6", 8" and irregular shaped pieces. The maximum temperature is 1100°C for the system. Gases used are O<sub>2</sub>, Steam from DI-H<sub>2</sub>O, N<sub>2</sub>.
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Recipe Characterization Data, such as thermal oxidation times, can be found on the recipe page:
Recipe Characterization Data, such as thermal oxidation times, can be found on the recipe page:

* [[Thermal Processing Recipes|Thermal Processing Recipes: Tystar 8300]]
*[[Thermal Processing Recipes|Thermal Processing Recipes: Tystar 8300]]

Use the [http://cleanroom.byu.edu/OxideTimeCalc BYU] or [http://www.lelandstanfordjunior.com/thermaloxide.html Stanford Leland Jr.] Thermal Oxidation Calculators to determine the time and temperature that will be necessary for your process needs. You can "calibrate" your oxidations to the Stanford calculator by adjusting the ''Partial Pressure'' on the calculator to match your experimental data.
Use the [http://cleanroom.byu.edu/OxideTimeCalc BYU] or [http://www.lelandstanfordjunior.com/thermaloxide.html Stanford Leland Jr.] Thermal Oxidation Calculators to determine the time and temperature that will be necessary for your process needs. You can "calibrate" your oxidations to the Stanford calculator by adjusting the ''Partial Pressure'' on the calculator to match your experimental data.


Keep in mind that all process must be 30 minutes in length at a minimum. Processes less than 30 minutes will suffer from poor uniformity because the process tube will not have sufficient time to saturate with O<sub>2</sub> or DI-H<sub>2</sub>O.
Keep in mind that all process must be 30 minutes in length at a minimum. Processes less than 30 minutes will suffer from poor uniformity because the process tube will not have sufficient time to saturate with O<sub>2</sub> or DI-H<sub>2</sub>O.


=== Gases Available ===
===Gases Available===

* N2 (15/5 slpm)
* O2 High-range "O2HI" - 15 slpm
*N2 (15/5 slpm)
* O2 Low-range "O2LO" - 1 slpm
*O2 High-range "O2HI" - 15 slpm
*O2 Low-range "O2LO" - 1 slpm
* All gasses flow through the H2O bubbler, which can optionally be filled with heated water or evacuated (no water).
*All gasses flow through the H2O bubbler, which can optionally be filled with heated water to flow steam, or evacuated (no steam, gas only).


==Recipes==
==Recipes==
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'''Tube 1:'''
'''Tube 1:'''

* SOG425.001 - ''Spin-On Glass Cure''
* ALGAAS.001 - ''Oxidation of AlGaAs''
*SOG425.001 - ''Spin-On Glass Cure''
*ALGAAS.001 - ''Oxidation of AlGaAs''

'''Tube 2:'''
'''Tube 2:'''

⚫
* WET1050.002 - ''WetOx at 1050°C''
* DRY1050.002 - ''DryOx at 1050°C''
*WET1050.002 - ''WetOx at 1050°C''
* WETVAR.002 - ''WetOx, variable temp.''
*DRY1050.002 - ''DryOx at 1050°C''
* DRYVAR.002 - ''DryOx, variable temp.''
*WETVAR.002 - ''WetOx, variable temp.''
⚫
*DRYVAR.002 - ''DryOx, variable temp.''

'''Tube 3:'''
'''Tube 3:'''
⚫
* WET1050.003 - ''WetOx at 1050°C''
⚫
* DRY1050.003 - ''DryOx at 1050°C''
⚫
* WETVAR.003 - ''WetOx, variable temp.''
⚫
* DRYVAR.003 - ''DryOx, variable temp.''
⚫
* ANNEAL.003 - ''Anneal with variable time and temperature''


⚫
*WET1050.003 - ''WetOx at 1050°C''
⚫
=== [[Thermal Processing Recipes#Tystar 8300|<u>Oxidation Rates & Data</u>]] ===
⚫
*DRY1050.003 - ''DryOx at 1050°C''
⚫
*WETVAR.003 - ''WetOx, variable temp.''
⚫
*DRYVAR.003 - ''DryOx, variable temp.''
⚫
*ANNEAL.003 - ''Anneal with variable time and temperature''

⚫
===[[Thermal Processing Recipes#Tystar 8300|<u>Oxidation Rates & Data</u>]]===
''See the above recipes page for data on oxidation rates for standard oxidation recipes.''
''See the above recipes page for data on oxidation rates for standard oxidation recipes.''


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==See Also==
==See Also==

*[http://www.tystar.com/ Tystar] - Manufacturer of the tool
*[http://www.tystar.com/ Tystar] - Manufacturer of the tool
*[http://cleanroom.byu.edu/OxideThickCalc Silicon Thermal Oxide Thickness Calculator (BYU)] - Use this on-line calculator to calculate times for silicon oxidation.
*[http://cleanroom.byu.edu/OxideThickCalc Silicon Thermal Oxide Thickness Calculator (BYU)] - Use this on-line calculator to calculate times for silicon oxidation.

Revision as of 20:49, 6 December 2022

Tube Furnace (Tystar 8300)
Tystar.jpg
Tool Type Thermal Processing
Location Bay 4
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail bosch@ece.ucsb.edu
Description Tystar 8" 3-Tube Oxidation/Annealing System
Manufacturer Tystar Corporation
Model Tystar 8300
Sign up for this tool


About

The three stack Tystar 8” furnace is used primarily for 3 processes. The processes are dedicated for specific tubes as follows:

  • Tube #1: SOG curing & low-temp oxidation
  • Tubes #2 and #3: Dry or wet oxidation of silicon (unprocessed, clean)
  • Tube #3: General furnace annealing & oxidation, including processed material

Each process tube can accomodate up to one hundred 8” wafers per cycle. We have boats for 2", 3", 4", 6", 8" and irregular shaped pieces. The maximum temperature is 1100°C for the system. Gases used are O2, Steam from DI-H2O, N2.

Process Information

Recipe Characterization Data, such as thermal oxidation times, can be found on the recipe page:

Use the BYU or Stanford Leland Jr. Thermal Oxidation Calculators to determine the time and temperature that will be necessary for your process needs. You can "calibrate" your oxidations to the Stanford calculator by adjusting the Partial Pressure on the calculator to match your experimental data.

Keep in mind that all process must be 30 minutes in length at a minimum. Processes less than 30 minutes will suffer from poor uniformity because the process tube will not have sufficient time to saturate with O2 or DI-H2O.

Gases Available

  • N2 (15/5 slpm)
  • O2 High-range "O2HI" - 15 slpm
  • O2 Low-range "O2LO" - 1 slpm
  • All gasses flow through the H2O bubbler, which can optionally be filled with heated water to flow steam, or evacuated (no steam, gas only).

Recipes

The following are the available recipes on each furnace tube:

Tube 1:

  • SOG425.001 - Spin-On Glass Cure
  • ALGAAS.001 - Oxidation of AlGaAs

Tube 2:

  • WET1050.002 - WetOx at 1050°C
  • DRY1050.002 - DryOx at 1050°C
  • WETVAR.002 - WetOx, variable temp.
  • DRYVAR.002 - DryOx, variable temp.

Tube 3:

  • WET1050.003 - WetOx at 1050°C
  • DRY1050.003 - DryOx at 1050°C
  • WETVAR.003 - WetOx, variable temp.
  • DRYVAR.003 - DryOx, variable temp.
  • ANNEAL.003 - Anneal with variable time and temperature

Oxidation Rates & Data

See the above recipes page for data on oxidation rates for standard oxidation recipes.

Useful Information

Tystar Wafer Boat Drawing - 4" Wafer with 0.5mm Slots

See Also

Operational Instructions

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