Resistivity Mapper (CDE RESMAP): Difference between revisions

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(Updated SOP)
(Updated SOP)
 
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*[[CDE ResMap Quick-Start instructions]]
*[[CDE ResMap Quick-Start instructions]]
*[https://wiki.nanofab.ucsb.edu/w/images/3/37/CDE_ResMap_Operating_Instructions.pdf CDE ResMap SOP]
*[https://wiki.nanofab.ucsb.edu/w/images/3/37/CDE_ResMap_Operating_Instructions.pdf CDE ResMap Operating Instructions]
*System can export CSV files - contact supervisor for instructions.
*System can export CSV files - contact supervisor for instructions.

Latest revision as of 22:07, 30 October 2023

Resistivity Mapper (CDE RESMAP)
CDEResmap.jpg
Location Bay ?
Tool Type Inspection, Test and Characterization
Manufacturer Creative Design Engineering
Description CDE Resmap 4 Point Resistivity Mapper
Primary Supervisor Bill Millerski
(805) 893-2655
wmillerski@ucsb.edu

Secondary Supervisor

Tony Bosch

Recipes


About

The CDE Resmap 4 point resistivity mapper is used for measuring resistivity across the wafer for substrates and thin films deposited in the facility. The system can do automated resistivity mapping for pieces to 8 inch wafers.

The resistivity range is 2 mOhm/Square to 5 MOhm/square. Contour plots, 3D plots, histograms, data exporting are supported from the Windows XP based control system.

Instructions

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