Surface Analysis (KLA/Tencor Surfscan): Difference between revisions
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==Standard Recipes== |
==Standard Recipes== |
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* [https://wiki.nanofab.ucsb.edu/w/images/0/04/SURFSCAN_6200_8inch_wafers.pdf Surfscan 6200 8inch wafers] * |
* [https://wiki.nanofab.ucsb.edu/w/images/0/04/SURFSCAN_6200_8inch_wafers.pdf Surfscan 6200 8inch wafers] * |
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* [https://wiki.nanofab.ucsb.edu/w/images/8/87/SURFSCAN_6200_4inch_wafers.pdf Surfscan 6200 4inch wafers] * |
* [https://wiki.nanofab.ucsb.edu/w/images/8/87/SURFSCAN_6200_4inch_wafers.pdf Surfscan 6200 4inch wafers] * |
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* [https://wiki.nanofab.ucsb.edu/w/images/1/1a/SURFSCAN_6200_2_and_3inch_wafers.pdf Surfscan 6200 2 and 3inch wafers] * |
* [https://wiki.nanofab.ucsb.edu/w/images/1/1a/SURFSCAN_6200_2_and_3inch_wafers.pdf Surfscan 6200 2 and 3inch wafers] * |
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* [https://wiki.nanofab.ucsb.edu/w/images/ |
* [https://wiki.nanofab.ucsb.edu/w/images/4/4e/SURFSCAN_6200_Small_substrates.pdf Surfscan 6200 Small samples] * |
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==Examples== |
==Examples== |
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Revision as of 00:19, 22 December 2023
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About
This system uses a laser-based scattering method to count size and distribution of particles (or other scattering defects) on a flat wafer surface. It can scan wafers in size from 4 to 8 inches.
Documentation
- Standard Operating Procedure
- Operations Manual
- For detailed measurement info, it is highly recommended that you read the manual.
- Wafer scanning process traveler
- Glossary
- Errors
Standard Recipes
- Surfscan 6200 8inch wafers *
- Surfscan 6200 6inch wafers *
- Surfscan 6200 4inch wafers *
- Surfscan 6200 2 and 3inch wafers *
- Surfscan 6200 Small samples *
Examples
| Gain 4: Small Particles
(0.160µm – 1.60µm) |
Gain 2: Large Particles
(1.60µm – 28.0µm) |
|---|---|
|
|
| Gain 4: Small Particles
(0.160µm – 1.60µm) |
Gain 2: Large Particles
(1.60µm – 28.0µm) |
|---|---|
|
|