Template:Announcements

RIE 5 is up

RIE 5 is up except for processes that use SiCl4.

//Vraj Mehalana 09:39, 30 January 2024 (PST)

Dry Etch, Si Deep RIE (PlasmaTherm DSEIII) - DSE Update

We have disassembled the entire chamber lid assembly. I have put an order in for all the necessary replacement parts and am waiting to hear back on the lead time for a couple of the items. I should have an update tomorrow.

Thanks,

-Aidan

//Vraj Mehalana 09:39, 30 January 2024 (PST)

ICP #1 is down

The tool remains down. We did not find any "smoking gun" with the PC but did find that the PC's power supply had a non functional fan and the power supply did not test as good (granted it would still power up the PC). We will continue troubleshooting the PC issue in the morning.

-Lee

//Vraj Mehalana 09:39, 30 January 2024 (PST)

EBeam3 Planned Maintenance 2/7/24 - 2/8/24

EBeam3 is scheduled to be down starting at 8:00am on 2/7/24 through 4:00pm on 2/8//24 so that we can install the new transfer arm.

Please plan accordingly.

//Vraj Mehalana 09:28, 26 January 2024 (PST)

Oxford Cobra: Software bugs

The latest revision of software has several bugs: see email for details. We are working with Oxford to resolve via software upgrade. // Demis D. John 10:08, 17 January 2024 (PST)

ASML Maintenance: Jan 29th-31st

The ASML will be down for periodic preventative maintenance on Jan 29th-Jan31st, please plan your process accordingly. // Demis D. John 17:00, 11 January 2024 (PST)

Gowning Refresh: Jan 23rd

Beginning Tuesday January 23rd, we will be pulling gowns and booties for refresh. Please remove all personal items from your suits prior to the week your section will be cleared. // Demis D. John 07:28, 11 January 2024 (PST)

EBeam#1: UP

EBeam1 is UP. // Demis D. John 10:07, 17 January 2024 (PST)

DUV Flood: UP with new procedure

The new parts have been installed and the tool has been tested.

We have added a timer that interlocks the lamp power supply since some users seem to have a problem remembering to turn the tool off when finished with it. The minimum time it can be set for is 30 minutes and the max is 4 hours. You will no longer be operating the main breaker on the front of the power supply. I have updated the SOP to reflect the changes, there is a copy at the tool and on its Wiki page.

// Demis D. John 17:18, 4 January 2024 (PST)

Job Opening: Process Engineer

The Nanofab has a current job opening for a Process/Wafer-Fab Engineer, see the NanoFab Job Openings page for details.

//Demis D. John 14:52, 30 October 2023 (PDT)

Lab Access Changes: Symmetry App

Card/Iris scanner access is still currently enabled. However we will be moving to a smartphone-based access system. IMPORTANT: check your email to setup the new smartphone access system, so you will be ready when we switch to the new system. Look for an email titled "Invitation to Access Symmetry App".

// John d 13:49, 7 November 2023 (PST)

Wafer Bonder, (Suss SB6-8E)

SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST)