Dry Etching Recipes: Difference between revisions
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(→Process Ranking Table: minor updates to Process Maturity level) |
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==='''Process Ranking Table'''=== |
==='''Process Ranking Table'''=== |
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Processes in the table above are ranked by their "''Process Maturity''" as follows: |
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{| class="wikitable" |
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!Process Level |
!Process Level |
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|A |
|A |
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| colspan="11" |Process allowed and materials available but never |
| colspan="11" |Process allowed and materials available but never done |
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|R1 |
|R1 |
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| colspan="11" |Process has been |
| colspan="11" |Process has been run at least once |
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|R2 |
|R2 |
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| colspan="11" |Process has been |
| colspan="11" |Process has been run and/or procedure is documented or/and data available |
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|R3 |
|R3 |
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| colspan="11" |Process has been |
| colspan="11" |Process has been run, procedure is documented, and data is available |
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|R4 |
|R4 |
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| colspan="11" |Process has a documented procedure with regular (≥4x per year) data or lookahead/in- |
| colspan="11" |Process has a documented procedure with regular (≥4x per year) data '''or''' lookahead/in-situ control available |
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|R5 |
|R5 |
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| colspan="11" |Process has a documented procedure with regular (≥4x per year) data and lookahead/in- |
| colspan="11" |Process has a documented procedure with regular (≥4x per year) data '''and''' lookahead/in-situ control available |
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|- |
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|R6 |
|R6 |
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| colspan="11" |Process has a documented procedure, regular ( ≥4x per year) data, and control charts |
| colspan="11" |Process has a documented procedure, regular ( ≥4x per year) data, and control charts & limits available |
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[[Category:Processing]] |
[[Category:Processing]] |
Revision as of 16:32, 24 July 2024
Process Control Data
See above linked page for process control data (dep rate/stress etc. over time), for a selection of often-used dry etches
Dry Etching Tools/Materials Table
The Key/Legend for this table's A...R5
values is at the bottom of the page.
Process Ranking Table
Processes in the table above are ranked by their "Process Maturity" as follows:
Process Level | Description of Process Level Ranking | ||||||||||
---|---|---|---|---|---|---|---|---|---|---|---|
A | Process allowed and materials available but never done | ||||||||||
R1 | Process has been run at least once | ||||||||||
R2 | Process has been run and/or procedure is documented or/and data available | ||||||||||
R3 | Process has been run, procedure is documented, and data is available | ||||||||||
R4 | Process has a documented procedure with regular (≥4x per year) data or lookahead/in-situ control available | ||||||||||
R5 | Process has a documented procedure with regular (≥4x per year) data and lookahead/in-situ control available | ||||||||||
R6 | Process has a documented procedure, regular ( ≥4x per year) data, and control charts & limits available |