AZ5214 - Basic Process: Difference between revisions
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(Created page with "AZ5214 is a positive PR to start. If you expose and develop, then the exposed areas develop out like a typical positive PR. File:AZ5214 Fabublox Positive PR schematic.png|n...") |
(inserted 5214 negative process) |
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AZ5214 is a positive PR to start. If you expose and develop, then the exposed areas develop out like a typical positive PR. |
AZ5214 is a positive PR to start. If you expose and develop, then the exposed areas develop out like a typical positive PR. |
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[[File:AZ5214 Fabublox Positive PR schematic.png|none|thumb|Positive operation with NO PEB.]] |
[[File:AZ5214 Fabublox Positive PR schematic.png|none|thumb|Positive operation with NO PEB nor Flood Expose. [''Schematic produced via [http://fabublox.com Fabublox]''<nowiki>]</nowiki>|399x399px]] |
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However if instead you expose, then post-exposure-Bake “PEB”, the exposed areas become Hardened/impervious to developer. But the rest of the PR is still unexposed. |
However if instead you expose, then post-exposure-Bake “PEB”, the exposed areas become Hardened/impervious to developer. But the rest of the PR is still unexposed. |
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So THEN you flood expose the rest of the unexposed PR, and like a positive PR this now allows that PR to develop out. |
So THEN you flood expose the rest of the unexposed PR, and like a positive PR this now allows that PR to develop out. |
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[[File:AZ5214 negative process schematic.png|alt=2D schematic of AZ5214 negative PR process|none|thumb|594x594px|Negative operation - requiring PEB and Flood Expose]] |
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=== Basic Process Flow === |
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A Basic 5214 the process should look like: |
A Basic 5214 the process should look like: |
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* Spin + soft-bake |
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Latest revision as of 23:39, 22 August 2024
AZ5214 is a positive PR to start. If you expose and develop, then the exposed areas develop out like a typical positive PR.
Positive operation with NO PEB nor Flood Expose. [Schematic produced via Fabublox]
However if instead you expose, then post-exposure-Bake “PEB”, the exposed areas become Hardened/impervious to developer. But the rest of the PR is still unexposed.
So THEN you flood expose the rest of the unexposed PR, and like a positive PR this now allows that PR to develop out.
Basic Process Flow
A Basic 5214 the process should look like:
- Spin + soft-bake
- MLA expose
- P.E.Bake - harden the exposed PR, making it "negative"
- Flood expose - expose the remaining positive PR
- Develop