Template:Announcements: Difference between revisions
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=====Stepper #3 (ASML DUV) - Down, update |
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Optical AF has been calibrated and Defocus + Dose values are the same as before. PneuAF has not been checked et, but we expect a shift in PneuAF Defocus due to the Pneumatic nozzle replacement. |
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=====Stepper #3 (ASML DUV) - Down, update===== |
=====Stepper #3 (ASML DUV) - Down, update===== |
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The alignment laser has now fully failed (no laser output at all), so we can't perform any exposures. |
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Sorry to say, I was not able to remedy the wafer handling pick up issue, and the system still intermittent,y fails to pick up a wafer correctly. I might have a temporary workaround by using specific slots and such, but I would need to help you do this. |
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ASML engineers will be on site Monday Tues (Sept 16th) to perform the repair. |
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I have ordered a replacement for the possibly failing WH board causing this. |
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Let me know if you want to try and run one or two wafers through and I might be able to help you do this, but I was having difficulty getting exposures to run properly. |
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To fix the main alignment, laser issue, Asml engineers will be on site Monday and Tuesday next week, so the tool will be down during that time to perform the repairs. |
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The IBD is still Down, Depo failing to ignite. We will continue to look into these tomorrow. |
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//[[User: |
-- Barreraz // [[User:John_d|Demis D. John]] 18:14, 11 September 2024 (PDT) |
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=====LAB OPEN===== |
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House vacuum repair has been completed, lab is open for use. |
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//[[User:John_d|Demis D. John]] 12:13, 6 September 2024 (PDT) |
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Heidelberg engineer is on site working on repair, we will update as we learn more. |
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The IBD is back up. |
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With Mike Silva's help, the fixture was recovered without having to vent the loadlock/chamber. |
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=====Suss SB6-8E===== |
=====Suss SB6-8E===== |
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=====EBeam#2: |
=====EBeam#2: Up===== |
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Bell jar mount is in place. Hoist has been tested several times. System is ready to use. |
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Good news is we have repaired and reinstalled the hoist, thanks Mike B. and Bill. I have tested it and everything looks good. |
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However, the repaired bell jar mount is not sliding down the hoist pole like it should. Since the repair involved some welding to the collar that slides down the hoist pole, we surmise that the concentricity was affected by the heat. The mount is back at the machine shop getting honed out. I should have it back to test late today/early tomorrow but it may have to go back again. Once it is able to slide on properly the tool should be up shortly thereafter. |
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-Lee // [[User:John_d|Demis D. John]] 14:24, 27 August 2024 (PDT) |
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=====YES EcoClean: 3kW only===== |
=====YES EcoClean: 3kW only===== |
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the YES has been giving downstream temp warnings for the RF generator. These happen on the 3000W recipes that run for more than 4-5 minutes, and are just warnings (yellow banner/light), and can just be acknowledged without notifying Staff. Our other generator is out for repair, so this will be the norm until we get it back. Please let us know if you do get an error for this; red banner/light. |
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I swapped out the RF generator and the tool is working again. I am getting repeated CCP warnings for the 0.7kW recipes so we will need to look into that further. |
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System is up for 3kW recipes only. |
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DO NOT run 0.7kW recipes until further notice!! |
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-- |
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Lee Sawyer//[[User:John_d|Demis D. John]] 11:31, 23 August 2024 (PDT) |
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=====ICP1 Down===== |
=====ICP1 Down===== |
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Revision as of 01:14, 12 September 2024
MLA150: UP
Optical AF has been calibrated and Defocus + Dose values are the same as before. PneuAF has not been checked et, but we expect a shift in PneuAF Defocus due to the Pneumatic nozzle replacement. // Demis D. John 18:14, 11 September 2024 (PDT)
Stepper #3 (ASML DUV) - Down, update
The alignment laser has now fully failed (no laser output at all), so we can't perform any exposures. ASML engineers will be on site Monday Tues (Sept 16th) to perform the repair. // Demis D. John 18:14, 11 September 2024 (PDT)
IBD is DOWN
The IBD is still Down, Depo failing to ignite. We will continue to look into these tomorrow. -- Barreraz // Demis D. John 18:14, 11 September 2024 (PDT)
Suss SB6-8E
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
-Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT)
EBeam#2: Up
Bell jar mount is in place. Hoist has been tested several times. System is ready to use. // Demis D. John 18:14, 11 September 2024 (PDT)
YES EcoClean: 3kW only
the YES has been giving downstream temp warnings for the RF generator. These happen on the 3000W recipes that run for more than 4-5 minutes, and are just warnings (yellow banner/light), and can just be acknowledged without notifying Staff. Our other generator is out for repair, so this will be the norm until we get it back. Please let us know if you do get an error for this; red banner/light.
// Demis D. John 18:14, 11 September 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)