Surface Analysis (KLA/Tencor Surfscan): Difference between revisions

From UCSB Nanofab Wiki
Jump to navigation Jump to search
Line 27: Line 27:
**''This is the procedure Staff uses to calibrate particle counts on our deposition tools.''
**''This is the procedure Staff uses to calibrate particle counts on our deposition tools.''


Surfscan instructions [wafers different size, and pieces]
* [Surfscan instructions [wafers different size, and pieces]


*[https://drive.google.com/drive/folders/1OcByelh_v8a2CezFyC7w5lTMMdLgVy_a 8inch wafers]
**[https://drive.google.com/drive/folders/1OcByelh_v8a2CezFyC7w5lTMMdLgVy_a 8inch wafers]
*[https://drive.google.com/drive/folders/1OcByelh_v8a2CezFyC7w5lTMMdLgVy_a 6inch wafers]
**[https://drive.google.com/drive/folders/1OcByelh_v8a2CezFyC7w5lTMMdLgVy_a 6inch wafers]


*[https://wiki.nanofab.ucsb.edu/w/images/1/1a/SURFSCAN_6200_122023_for_6inch_wafers.pdf Surfscan 6200 6inch wafers] *
*[https://wiki.nanofab.ucsb.edu/w/images/1/1a/SURFSCAN_6200_122023_for_6inch_wafers.pdf Surfscan 6200 6inch wafers] *

Revision as of 18:38, 27 September 2024

Surface Analysis (KLA/Tencor Surfscan)
KLA.jpg
Location Bay 5
Tool Type Inspection, Test and Characterization
Manufacturer Tencor
Description Surface Analysis
KLA/Tencor Surfscan

Primary Supervisor Biljana Stamenic
(805) 893-4002
biljana@ece.ucsb.edu

Secondary Supervisor

Don Freeborn


Recipes


About

This system uses a laser-based scattering method to count size and distribution of particles (or other scattering defects) on a flat wafer surface.

It can scan wafers in size from 4 to 8 inches. Piece-parts are more difficult but can be scanned with a custom recipe.

4-inch wafers are the most standard size to measure.

For measuring very low particle counts accurately, purchase "low particle count" (LPC) wafers from a Silicon wafer vendor, and keep the wafers in the case and clean at all times until use.

Documentation

Operating Procedures

  • [Surfscan instructions [wafers different size, and pieces]

Other Documentation

  • Operations Manual
    • For detailed measurement info, it is highly recommended that you read the manual.

Examples

A low-particle 4-inch wafer example:
Gain 4: Small Particles

(0.160µm – 1.60µm)

Gain 2: Large Particles

(1.60µm – 28.0µm)

Surfscan Low-Particle Example - G4.png Surfscan Low-Particle Example - G2.png
A high-particle 4-inch wafer example:
Gain 4: Small Particles

(0.160µm – 1.60µm)

Gain 2: Large Particles

(1.60µm – 28.0µm)

Surfscan - 230113A7 Gain4 high particles.jpg Surfscan 230113A7G2 after low particles.jpg