Template:Announcements: Difference between revisions
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=====Stepper #3 (ASML DUV) - Tool |
=====Stepper #3 (ASML DUV) - Tool UP===== |
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We finished calibrations, tool is up and ready for use. |
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Wafer stage positioning laser is dying, Asml engineers will be on site Monday and Tuesday to repair. We have the replacement already on hand. |
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No limit on number of wafers. |
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Input has been set back to port # 1 (right) cassette, outputting to Left cassette (Port #2). // [[User:John_d|Demis D. John]] 17:36, 9 October 2024 (PDT) |
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=====MLA Service Complete===== |
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The FSE has completed their work. |
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I ran beam offset checks on both lasers prior to the maintenance and found that the Y axis value for the 405 laser was off by ~0.6 µm. I made the necessary change and ran another check with all values in spec. I also ran beam offset checks on both laser post maintenance along with an overlay exposure and all looked good. |
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Tool is available to use. |
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-Lee // [[User:John_d|Demis D. John]] 17:46, 2 October 2024 (PDT) |
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=====Suss SB6-8E===== |
=====Suss SB6-8E===== |
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Revision as of 00:36, 10 October 2024
Stepper #3 (ASML DUV) - Tool UP
We finished calibrations, tool is up and ready for use. No limit on number of wafers.
Input has been set back to port # 1 (right) cassette, outputting to Left cassette (Port #2). // Demis D. John 17:36, 9 October 2024 (PDT)
Suss SB6-8E
When the vendor came in to install the new top heater he wasn't able to get the z-axis (elevator motor) to move. He was able to install the new heater and do a PM on the rest of the tool. We are ordering a new z-axis controller on the recommendation of the vendor. If all goes well this should solve the issue and make the bonder fully operational. I'll send out an email once the new controller has been installed.
-Aidan //Vraj Mehalana 12:43, 3 September 2024 (PDT)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST)
Lab Access Changes: Symmetry App
The iris scanner has been decommissioned. Please use the card reader which supports:
-Physical card
-Mobile phone via Symmetry App
//Vraj Mehalana 16:59, 14 June 2024 (PDT)