Dry Etching Recipes: Difference between revisions

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Revision as of 01:15, 10 February 2026

See above linked page for process control data (dep rate/stress etc. over time), for a selection of often-used dry etches

The Key/Legend for this table's A...R6 values is at the bottom of the page.

Processes in the table above are ranked by their "Process Maturity Level" as follows:

Process Level	Description of Process Level Ranking
A	Process Allowed and materials available but never done
R1	Process has been ran at least once
R2	Process has been ran and procedure is documented
R3	Process has been ran, procedure is documented, and data is available
R4	Process has a documented procedure with regular (≥4x per year) data no in-Situ control available
R5	Process has a documented procedure with regular (≥4x per year) data and in-Situ control available
R6	Process has a documented procedure and control charts/limits available. Controlled process.

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