Sputtering Recipes: Difference between revisions
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=[[Sputter 4 (AJA ATC 2200-V)]]= |
=[[Sputter 4 (AJA ATC 2200-V)]]= |
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=[[Sputter 5 (Lesker AXXIS)]]= |
=[[Sputter 5 (Lesker AXXIS)]]= |
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=[[Ion Beam Deposition (Veeco NEXUS)]]= |
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==SiO{{sub|2}} deposition (IBD)== |
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*{{fl|IBD-SiO2-Recipe.pdf|SiO{{Sub|2}} dep}} |
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==SiN deposition (IBD)== |
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*{{fl|SiNfilm.pdf|SiN Film Data (IBD)}} |
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*{{fl|SiNrecipedetails.pdf|SiN Recipe Details (IBD)}} |
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==Ta{{sub|2}}O{{sub|5}} deposition (IBD)== |
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*{{fl|IBD-Ta2O5-Recipe.pdf|Ta{{sub|2}}O{{sub|5}} dep}} |
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Revision as of 15:35, 7 September 2012
Back to Vacuum Deposition Recipes.