Sputtering Recipes: Difference between revisions

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==SiN deposition (IBD)==
==SiN deposition (IBD)==


*{{fl|IBD-SiN-recipe.pdf|SiN Recipe (IBD)}}
*{{fl|SiNfilm.pdf|SiN Film Data (IBD)}}
*{{fl|SiNfilm.pdf|SiN Film Data (IBD)}}
*{{fl|SiNrecipedetails.pdf|SiN Recipe Details (IBD)}}
*{{fl|SiNrecipedetails.pdf|SiN Recipe Details (IBD)}}

Revision as of 17:17, 7 September 2012

Back to Vacuum Deposition Recipes.

Sputter 1 (Custom)

Sputter 2 (SFI Endeavor)

Sputter 3 (AJA ATC 2000-F)

Sputter 4 (AJA ATC 2200-V)

Sputter 5 (Lesker AXXIS)

Ion Beam Deposition (Veeco NEXUS)

SiO2 deposition (IBD)

SiN deposition (IBD)

Ta2O5 deposition (IBD)

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