Sputtering Recipes: Difference between revisions
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==SiN deposition (IBD)== |
==SiN deposition (IBD)== |
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*{{fl|IBD-SiN-recipe.pdf|SiN Recipe (IBD)}} |
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*{{fl|SiNfilm.pdf|SiN Film Data (IBD)}} |
*{{fl|SiNfilm.pdf|SiN Film Data (IBD)}} |
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*{{fl|SiNrecipedetails.pdf|SiN Recipe Details (IBD)}} |
*{{fl|SiNrecipedetails.pdf|SiN Recipe Details (IBD)}} |
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Revision as of 17:17, 7 September 2012
Back to Vacuum Deposition Recipes.