Vacuum Deposition Recipes: Difference between revisions

Revision as of 18:11, 7 September 2012

Y = Recipe, A = Avaliable

Vacuum Deposition Recipes
	E-Beam Evaporation				Sputtering						Thermal Evaporation		Plasma Enhanced Chemical Vapor Deposition (PECVD)			Atomic Layer Deposition	Molecular Vapor Deposition
Material	E-Beam 1 (Sharon)	E-Beam 2 (Custom)	E-Beam 3 (Temescal)	E-Beam 4 (CHA)	Sputter 1 (Custom)	Sputter 2 (SFI Endeavor)	Sputter 3 (ATC 2000-F)	Sputter 4 (ATC 2200-V)	Sputter 5 (Lesker AXXIS)	Ion Beam Deposition (Tool)	Thermal Evap 1	Thermal Evap 2 (Solder)	PECVD 1 (PlasmaTherm 790)	PECVD 2 (Advanced Vacuum)	Unaxis VLR ICP-PECVD	Atomic Layer Deposition (Tool)	Molecular Vapor Deposition (Tool)
Ag	A		A	A
Al	A		A	A
Al₂O₃	A	A														R1
AlN																R1
Au	A		A	A
B
Co
Cr
Cu
Fe
Ge
Hf
HfO₂																R1
In
Ir
ITO
Mo
Nb
Ni
Pd
Pt
Ru
Si
SiN										R1			R1	R1	R1
SiO₂										R1			R1	R1	R1	R1
SiO_xN_y
Sn
SrF₂
Ta
Ta₂O₅										R1
Ti
TiN
TiO₂
V
W
Zn
ZnO₂
Zr
ZrO₂																R1
Material	E-Beam 1 (Sharon)	E-Beam 2 (Custom)	E-Beam 3 (Temescal)	E-Beam 4 (CHA)	Sputter 1 (Custom)	Sputter 2 (SFI Endeavor)	Sputter 3 (ATC 2000-F)	Sputter 4 (ATC 2200-V)	Sputter 5 (Lesker AXXIS)	Ion Beam Deposition (Tool)	Thermal Evap 1	Thermal Evap 2 (Solder)	PECVD 1 (PlasmaTherm 790)	PECVD 2 (Advanced Vacuum)	Unaxis VLR ICP-PECVD	Atomic Layer Deposition (Tool)	Molecular Vapor Deposition (Tool)

@@ Line 34: / Line 34: @@
 |-
 ! bgcolor="#D0E7FF" align="center" | Ag
+| bgcolor="EEFFFF" | {{Al/E1}}
 | bgcolor="EEFFFF" | <br>
-| bgcolor="EEFFFF" | <br>
+| bgcolor="EEFFFF" | {{Al/E3}}
-| bgcolor="EEFFFF" | <br>
+| bgcolor="EEFFFF" | {{Al/E4}}
-| bgcolor="EEFFFF" | <br>
 | bgcolor="EEFFFF" | <br>
 | bgcolor="EEFFFF" | <br>
@@ Line 53: / Line 53: @@
 |-
 ! bgcolor="#D0E7FF" align="center" | Al
+| {{Al/E1}}
 | <br>
-| <br>
+| {{Al/E3}}
-| <br>
+| {{Al/E4}}
-| <br>
 | <br>
 | <br>
@@ Line 72: / Line 72: @@
 |-
 ! bgcolor="#D0E7FF" align="center" | Al<sub>2</sub>O<sub>3</sub>
-| bgcolor="EEFFFF" | <br>
+| bgcolor="EEFFFF" | {{Al/E1}}
-| bgcolor="EEFFFF" | <br>
+| bgcolor="EEFFFF" | {{Al/E2}}
 | bgcolor="EEFFFF" | <br>
 | bgcolor="EEFFFF" | <br>
@@ Line 110: / Line 110: @@
 |-
 ! bgcolor="#D0E7FF" align="center" | Au
+| bgcolor="EEFFFF" | {{Al/E1}}
 | bgcolor="EEFFFF" | <br>
-| bgcolor="EEFFFF" | <br>
+| bgcolor="EEFFFF" | {{Al/E3}}
-| bgcolor="EEFFFF" | <br>
+| bgcolor="EEFFFF" | {{Al/E4}}
-| bgcolor="EEFFFF" | <br>
 | bgcolor="EEFFFF" | <br>
 | bgcolor="EEFFFF" | <br>