Vacuum Deposition Recipes: Difference between revisions

From UCSB Nanofab Wiki
Jump to navigation Jump to search
No edit summary
No edit summary
Line 151: Line 151:
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | {{Al/E4}}
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
Line 170: Line 170:
| <br>
| <br>
| <br>
| <br>
| <br>
| {{Al/E4}}
| <br>
| <br>
| <br>
| <br>
Line 208: Line 208:
| <br>
| <br>
| <br>
| <br>
| {{Al/E4}}
| <br>
| <br>
| <br>
| <br>
| <br>
Line 224: Line 224:
|-
|-
! bgcolor="#D0E7FF" align="center" | Ge
! bgcolor="#D0E7FF" align="center" | Ge
⚫
| bgcolor="EEFFFF" | {{Al/E1}}
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | {{Al/E3}}
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | {{Al/E4}}
⚫
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
Line 246: Line 246:
| <br>
| <br>
| <br>
| <br>
| {{Al/E4}}
| <br>
| <br>
| <br>
| <br>
| <br>
Line 303: Line 303:
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | {{Al/E4}}
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
Line 320: Line 320:
! bgcolor="#D0E7FF" align="center" | ITO
! bgcolor="#D0E7FF" align="center" | ITO
| <br>
| <br>
| <br>
| {{Al/E2}}
| <br>
| <br>
| <br>
| <br>
Line 376: Line 376:
|-
|-
! bgcolor="#D0E7FF" align="center" | Ni
! bgcolor="#D0E7FF" align="center" | Ni
⚫
| bgcolor="EEFFFF" | {{Al/E1}}
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | {{Al/E3}}
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | {{Al/E4}}
⚫
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
Line 395: Line 395:
|-
|-
! bgcolor="#D0E7FF" align="center" | Pd
! bgcolor="#D0E7FF" align="center" | Pd
| {{Al/E1}}
| <br>
| <br>
| <br>
| {{Al/E3}}
| {{Al/E4}}
| <br>
| <br>
| <br>
| <br>
| <br>
| <br>
Line 414: Line 414:
|-
|-
! bgcolor="#D0E7FF" align="center" | Pt
! bgcolor="#D0E7FF" align="center" | Pt
⚫
| bgcolor="EEFFFF" | {{Al/E1}}
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | {{Al/E3}}
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | {{Al/E4}}
⚫
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
Line 436: Line 436:
| <br>
| <br>
| <br>
| <br>
| <br>
| {{Al/E4}}
| <br>
| <br>
| <br>
| <br>
Line 453: Line 453:
! bgcolor="#D0E7FF" align="center" | Si
! bgcolor="#D0E7FF" align="center" | Si
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | {{Al/E2}}
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | {{Al/E3}}
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
Line 471: Line 471:
|-
|-
! bgcolor="#D0E7FF" align="center" | SiN
! bgcolor="#D0E7FF" align="center" | SiN
| <br>
| {{Al/E1}}
| <br>
| <br>
| <br>
| <br>
Line 491: Line 491:
! bgcolor="#D0E7FF" align="center" | SiO<sub>2</sub>
! bgcolor="#D0E7FF" align="center" | SiO<sub>2</sub>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | {{Al/E2}}
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
Line 510: Line 510:
! bgcolor="#D0E7FF" align="center" | SiO<sub>x</sub>N<sub>y</sub>
! bgcolor="#D0E7FF" align="center" | SiO<sub>x</sub>N<sub>y</sub>
| <br>
| <br>
| <br>
| {{Al/E2}}
| <br>
| <br>
| <br>
| <br>
Line 548: Line 548:
! bgcolor="#D0E7FF" align="center" | SrF<sub>2</sub>
! bgcolor="#D0E7FF" align="center" | SrF<sub>2</sub>
| <br>
| <br>
| <br>
| {{Al/E2}}
| <br>
| <br>
| <br>
| <br>
Line 588: Line 588:
| <br>
| <br>
| <br>
| <br>
| {{Al/E2}}
| <br>
| <br>
| <br>
| <br>
| <br>
Line 604: Line 604:
|-
|-
! bgcolor="#D0E7FF" align="center" | Ti
! bgcolor="#D0E7FF" align="center" | Ti
⚫
| bgcolor="EEFFFF" | {{Al/E1}}
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | {{Al/E3}}
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | {{Al/E4}}
⚫
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
Line 643: Line 643:
! bgcolor="#D0E7FF" align="center" | TiO<sub>2</sub>
! bgcolor="#D0E7FF" align="center" | TiO<sub>2</sub>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | {{Al/E2}}
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
| bgcolor="EEFFFF" | <br>
Line 740: Line 740:
| <br>
| <br>
| <br>
| <br>
| <br>
| {{Al/E4}}
| <br>
| <br>
| <br>
| <br>

Revision as of 18:17, 7 September 2012

Y = Recipe, A = Avaliable


Vacuum Deposition Recipes

 E-Beam Evaporation Sputtering Thermal Evaporation Plasma Enhanced Chemical
Vapor Deposition (PECVD) 		Atomic Layer Deposition Molecular Vapor Deposition
Material E-Beam 1 (Sharon) E-Beam 2 (Custom) E-Beam 3 (Temescal) E-Beam 4 (CHA) Sputter 1 (Custom) Sputter 2
(SFI Endeavor) 		Sputter 3
(ATC 2000-F) 		Sputter 4
(ATC 2200-V) 		Sputter 5 (Lesker AXXIS) Ion Beam
Deposition (Tool) 		Thermal
Evap 1 		Thermal Evap 2 (Solder) PECVD 1
(PlasmaTherm 790) 		PECVD 2
(Advanced Vacuum) 		Unaxis VLR ICP-PECVD Atomic Layer Deposition (Tool) Molecular Vapor Deposition (Tool)
Ag A
A A












Al A
A A












Al2O3 A A












R1
AlN














R1
Au A
A A












B
















Co


A












Cr


A












Cu
















Fe


A












Ge A
A A












Hf


A












HfO2














R1
In
















Ir


A












ITO
A














Mo
















Nb
















Ni A
A A












Pd A
A A












Pt A
A A












Ru


A












Si
A A













SiN A







R1

R1 R1 R1

SiO2
A






R1

R1 R1 R1 R1
SiOxNy
A














Sn
















SrF2
A














Ta
















Ta2O5


A




R1






Ti A
A A












TiN
















TiO2
A














V
















W
















Zn
















ZnO2
















Zr


A












ZrO2














R1
Material E-Beam 1 (Sharon) E-Beam 2 (Custom) E-Beam 3 (Temescal) E-Beam 4 (CHA) Sputter 1 (Custom) Sputter 2
(SFI Endeavor) 		Sputter 3
(ATC 2000-F) 		Sputter 4
(ATC 2200-V) 		Sputter 5 (Lesker AXXIS) Ion Beam
Deposition (Tool) 		Thermal
Evap 1 		Thermal Evap 2 (Solder) PECVD 1
(PlasmaTherm 790) 		PECVD 2
(Advanced Vacuum) 		Unaxis VLR ICP-PECVD Atomic Layer Deposition (Tool) Molecular Vapor Deposition (Tool)
Retrieved from "https://wiki.nanofab.ucsb.edu/w/index.php?title=Vacuum_Deposition_Recipes&oldid=2499"