Thermal Evaporation Recipes: Difference between revisions
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{{recipes|Vacuum Deposition}} |
{{recipes|Vacuum Deposition}} |
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=[[Thermal Evap 1]]= |
=[[Thermal Evap 1]]= |
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= Materials Table = |
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=Material table= |
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{| border="1" style="border: 1px solid #D0E7FF; background-color:#ffffff; text-align:center; font-size: 95%" class="collapsible collapsed wikitable" |
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! colspan=8 width=1300 height=35 bgcolor="#D0E7FF" align="center"|<div style="font-size: 150%;">Materials Table</div> |
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! width="45" bgcolor="#D0E7FF" align="center" | '''Material''' |
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! width="45" bgcolor="#D0E7FF" align="center" | '''Symbol''' |
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! width="45" bgcolor="#D0E7FF" align="center" | '''Density, g/cm3''' |
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! width="45" bgcolor="#D0E7FF" align="center" | '''Z Ratio''' |
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! width="45" bgcolor="#D0E7FF" align="center" | '''Tooling, %''' |
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! width="45" bgcolor="#D0E7FF" align="center" | '''Current, Amp''' |
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! width="45" bgcolor="#D0E7FF" align="center" | '''Dep.rate, A/sec''' |
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! width="100" bgcolor="#D0E7FF" align="center" | '''Comments''' |
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|Aluminum |
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|Al |
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|2.70 |
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|8.17 |
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|95 |
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|85 |
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|1 |
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|Used often |
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|Chromium |
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|Cr |
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| 7.20 |
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| 28.95 |
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|95 |
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|85 |
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|2 |
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|Used often |
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|Cobalt |
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|Co |
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|8.71 |
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|25.74 |
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|Copper |
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|Cu |
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|8.93 |
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|20.21 |
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|100 |
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|Used often |
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|Gold |
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|Au |
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|19.32 |
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|23.18 |
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|101.2 |
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|122 |
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|5 |
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|Used often |
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|Gold/Palladium |
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|Au.5/Pd.5 |
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|15.86 |
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|23.96 |
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|Gold/Palladium |
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|Au.5/Pd.4 |
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|16.40 |
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|23.80 |
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|Gold/Zinc |
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|Au.95/Zn.05 |
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|18.72 |
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|22.89 |
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|101.2 |
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|Gold/Zinc |
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|Au.90/Zn.10 |
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|18.07 |
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|22.58 |
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|Magnezium |
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|Mg |
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|1.74 |
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|5.48 |
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|98.4 |
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|Manganese |
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|Mn |
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|7.20 |
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|23.40 |
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|120 |
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|100 |
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|Nickel |
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|Ni |
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|8.90 |
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|26.68 |
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|100 |
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|50 |
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|4.5 |
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|Used often |
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|Nichrome |
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|NiCr |
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|8.32 |
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|27.59 |
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|100 |
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|0.4 |
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|Palladium |
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|Pd |
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|12.40 |
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|24.73 |
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|140.5 |
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|62 |
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|1.5 |
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|Used often |
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|Silicon Monoxide |
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|SiO |
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|2.13 |
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|10.19 |
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|120 |
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|70 |
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|Silver |
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|Ag |
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|10.5 |
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|16.69 |
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|Zinc |
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|Zn |
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|7.14 |
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|17.18 |
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|50 |
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|4.5 |
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|Used often |
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|Zinc Oxide |
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|ZnO |
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|5.61 |
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|15.88 |
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|StrontiumFluoride |
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|SrF<sub>2 |
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|4.28 |
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|12.15 |
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|200 |
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|Iron |
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|Fe |
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|7.86 |
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|25.30 |
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|ITO(IndiumTinOxide) |
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|In<sub>2</sub>O<sub>3</sub> - SnO<sub>2</sub> |
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|6.43-7.14 |
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|0.841 |
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|Permalloy |
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|Ni<sub>0.1</sub>Fe<sub>0.2 |
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|8.7 |
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|26.40 |
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|140 |
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|0.1 |
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Revision as of 20:47, 31 March 2014
Back to Vacuum Deposition Recipes.
Thermal Evap 1
Materials Table
Materials Table
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---|---|---|---|---|---|---|---|
Material | Symbol | Density, g/cm3 | Z Ratio | Tooling, % | Current, Amp | Dep.rate, A/sec | Comments |
Aluminum | Al | 2.70 | 8.17 | 95 | 85 | 1 | Used often |
Chromium | Cr | 7.20 | 28.95 | 95 | 85 | 2 | Used often |
Cobalt | Co | 8.71 | 25.74 | ||||
Copper | Cu | 8.93 | 20.21 | 100 | Used often | ||
Gold | Au | 19.32 | 23.18 | 101.2 | 122 | 5 | Used often |
Gold/Palladium | Au.5/Pd.5 | 15.86 | 23.96 | ||||
Gold/Palladium | Au.5/Pd.4 | 16.40 | 23.80 | ||||
Gold/Zinc | Au.95/Zn.05 | 18.72 | 22.89 | 101.2 | |||
Gold/Zinc | Au.90/Zn.10 | 18.07 | 22.58 | ||||
Magnezium | Mg | 1.74 | 5.48 | 98.4 | |||
Manganese | Mn | 7.20 | 23.40 | 120 | 100 | ||
Nickel | Ni | 8.90 | 26.68 | 100 | 50 | 4.5 | Used often |
Nichrome | NiCr | 8.32 | 27.59 | 100 | 0.4 | ||
Palladium | Pd | 12.40 | 24.73 | 140.5 | 62 | 1.5 | Used often |
Silicon Monoxide | SiO | 2.13 | 10.19 | 120 | 70 | ||
Silver | Ag | 10.5 | 16.69 | ||||
Zinc | Zn | 7.14 | 17.18 | 50 | 4.5 | Used often | |
Zinc Oxide | ZnO | 5.61 | 15.88 | ||||
StrontiumFluoride | SrF2 | 4.28 | 12.15 | 200 | |||
Iron | Fe | 7.86 | 25.30 | ||||
ITO(IndiumTinOxide) | In2O3 - SnO2 | 6.43-7.14 | 0.841 | ||||
Permalloy | Ni0.1Fe0.2 | 8.7 | 26.40 | 140 | 0.1 |