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15-GaAs etch-Unaxis ICP etcher.pdf
Ningcao
20:41, 2 October 2013
; 765 KB
13-GaAs-AlGaAs Etching-RIE-5.pdf
Ningcao
18:26, 2 October 2013
; 599 KB
12-Plasma Etching of AlGaAs-Panasonic ICP-1-Etcher.pdf
Ningcao
17:58, 2 October 2013
; 870 KB
Panasonic-1-Ti-Etch-Deep-RevA.pdf
Thibeault
22:49, 27 September 2013
; 497 KB
Panasonic-1-Al-Etch-RevA.pdf
Thibeault
18:53, 27 September 2013
; 85 KB
11-CZT etching-1.pdf
Ningcao
18:16, 27 September 2013
; 110 KB
TystarMechDrawWaferBoat.pdf
Ray t
00:02, 26 September 2013
; 450 KB
10-Si Etch using DRIE (single-step).pdf
Ningcao
16:59, 25 September 2013
; 843 KB
09-Plasma Etching of GaN-UnaxisPM1.pdf
Ningcao
21:13, 24 September 2013
; 500 KB
08-Plasma Etching of GaN-RIE5.pdf
Ningcao
22:40, 19 September 2013
; 706 KB
07-GaN Etch-Panasonic-ICP-1.pdf
Ningcao
22:42, 18 September 2013
; 1.43 MB
06-XeF2-etch-recipe.pdf
Ningcao
18:36, 17 September 2013
; 312 KB
05-SiO2 Nano-structure Etch.pdf
Ningcao
16:07, 17 September 2013
; 937 KB
02-ICP-PECVD-a-Si Film-90C.pdf
Ningcao
23:08, 11 September 2013
; 131 KB
03-Amorphous-Si-PECVD-2.pdf
Ningcao
23:03, 11 September 2013
; 248 KB
01-ICP-PECVD-a-Si-Deposition Recipe-250C.pdf
Ningcao
21:39, 11 September 2013
; 495 KB
PECVD1-WIKI PECVD SiN Index, dep.rates, stress.pdf
Biljana
16:55, 11 September 2013
; 130 KB
WIKI PECVD SIN Index,dep.rates,stress.pdf
Biljana
16:53, 11 September 2013
; 130 KB
Panasonic1-SiO2-Data-Process-Variation-CHF3-revA.pdf
Thibeault
18:16, 30 August 2013
; 487 KB
Panasonic1-SiO-Etch-SEM.pdf
Biljana
18:00, 21 August 2013
; 48 KB
Standard recipe SiO2-PECVD.pdf
Biljana
23:54, 20 August 2013
; 36 KB
Standard recipe SiN-PECVD.pdf
Biljana
23:54, 20 August 2013
; 36 KB
Gas Change CF4-SF6-CF4.pdf
Biljana
23:38, 20 August 2013
; 40 KB
Gas Change CHF3-Ar-3.pdf
Biljana
23:36, 20 August 2013
; 40 KB
Web Operational Procedure EB4 Rev 3.pdf
Bosch
23:06, 14 August 2013
; 736 KB
Holography-Process-Variation-revA.pdf
Thibeault
23:06, 18 July 2013
; 678 KB
Holography-Process-Gratings-revA.pdf
Thibeault
23:05, 18 July 2013
; 611 KB
Thermal-Nanoimprint-Process-Tutorial-revA.pdf
Thibeault
21:37, 18 July 2013
; 531 KB
Sputter-3 Operation Procedure Wiki.pdf
Bosch
22:17, 11 July 2013
; 921 KB
RemoverPG-revA.pdf
Thibeault
23:58, 10 July 2013
; 73 KB
OMNICOAT-revA.pdf
Thibeault
23:55, 10 July 2013
; 186 KB
SU-8-2075-revA.pdf
Thibeault
23:52, 10 July 2013
; 223 KB
SU-8-2015-revA.pdf
Thibeault
23:51, 10 July 2013
; 251 KB
512B-Application-Data-Bake-revA.pdf
Thibeault
23:45, 10 July 2013
; 292 KB
512B-Datasheet-revA.pdf
Thibeault
23:45, 10 July 2013
; 226 KB
BCB-cyclotene-4000-revA.pdf
Thibeault
23:37, 10 July 2013
; 198 KB
BCB-cyclotene-3000-revA.pdf
Thibeault
23:37, 10 July 2013
; 531 KB
Panasonic-1-Cr-Etch-revA.pdf
Thibeault
23:10, 10 July 2013
; 254 KB
UV210-Positive-Resist-Datasheet.pdf
Thibeault
21:21, 22 April 2013
; 582 KB
DS-K101-Anti-Reflective-Coating.pdf
Thibeault
21:20, 22 April 2013
; 960 KB
AR2-Anti-Reflective-Coating.pdf
Thibeault
21:20, 22 April 2013
; 91 KB
UVN2300-Negative-Resist-Datasheet.pdf
Thibeault
21:18, 22 April 2013
; 326 KB
UVN30-Negative-Ressit-Datasheet.pdf
Thibeault
21:16, 22 April 2013
; 326 KB
UV6-Positive-Resist-Datasheet.pdf
Thibeault
20:54, 22 April 2013
; 384 KB
NLOF5510-AS200-stepperrecipe.pdf
Zwarburg
16:14, 9 November 2012
; 983 KB
SPR955-1.8-AS200-stepperrecipe.pdf
Zwarburg
16:12, 9 November 2012
; 1.51 MB
SPR955-0.9-AS200-stepperrecipe.pdf
Zwarburg
15:48, 9 November 2012
; 887 KB
NLOF2020stepperrecipe.pdf
Zwarburg
00:59, 9 November 2012
; 391 KB
NLOF5510stepperrecipe.pdf
Zwarburg
00:56, 9 November 2012
; 692 KB
SPR-220-7.0stepperrecipe.pdf
Zwarburg
00:28, 9 November 2012
; 1.83 MB
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