Main public logs

Combined display of all available logs of UCSB Nanofab Wiki. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).

• 17:59, 27 January 2014 Thibeault talk contribs uploaded File:Lithography-BCB-photo-lowk-dielectric-spinon-4024-40-revA.docx
• 23:33, 3 December 2013 User account Gast j talk contribs was created
• 21:40, 14 November 2013 User account Park ju talk contribs was created
• 19:23, 5 November 2013 Ningcao talk contribs uploaded File:24-Ni and Ta Films using Sputter-3.pdf
• 23:09, 4 November 2013 Ningcao talk contribs uploaded File:23-Tungsten Sputtering Film-Sputter-4.pdf
• 20:49, 2 November 2013 Bovington j talk contribs uploaded File:Wet Etching of ALD Al2O3 Plasma 300C.xls (This is a list of wet etch experiment which people can feel free to add to.)
• 17:22, 28 October 2013 Ningcao talk contribs uploaded File:22-TiO2-Film-Sputter-2.pdf
• 23:38, 24 October 2013 Thibeault talk contribs uploaded File:Panasonic 1-SiC-ICP-RIE-Etch-Plasma-SF6-RevA.pdf
• 22:25, 24 October 2013 Thibeault talk contribs uploaded File:Panasonic1-sapphire-etch-RIE-Plasma-BCl3-ICP-RevA.pdf
• 20:40, 24 October 2013 Thibeault talk contribs uploaded File:Panasonic1-GaAs-PhotonicCrystal-RIE-Plasma-Nanoscale-Etch-RevA.pdf
• 18:34, 24 October 2013 Thibeault talk contribs uploaded File:Panasonic1-GaAs-Via-Etch-Plasma-RIE-Fast-DRIE-RevA.pdf
• 17:14, 24 October 2013 Thibeault talk contribs uploaded File:Panasonic1-GaN-AlGaN-Selective-Etch-Plasma-RIE-ICP-RevA.pdf
• 00:05, 24 October 2013 Thibeault talk contribs uploaded File:RIE2-ITO-Etch-MHA-Plasma-RevA.pdf
• 23:40, 23 October 2013 Thibeault talk contribs uploaded File:RIE2-InGaAs-InP-InAlAs-Etch-Plasma-RIE-RevA.pdf
• 23:11, 23 October 2013 Thibeault talk contribs uploaded File:Panasonic1-TiW-W-Etch-Plasma-RIE-RevA.pdf
• 22:05, 22 October 2013 Thibeault talk contribs uploaded File:Panasonic1-SiN-Etch-Plasma-CF4-O2-ICP-revA.pdf
• 18:40, 22 October 2013 Thibeault talk contribs uploaded File:Panasonic2-ICP-Plasma-Etch-SiN-nanoscale-rev1.pdf
• 18:18, 22 October 2013 Thibeault talk contribs uploaded File:Panasonic2-ICP-Plasma-Etch-SiO2-nanoscale-rev1.pdf
• 17:37, 10 October 2013 Ningcao talk contribs uploaded File:21-Au-Sputter-film-recipes-Sputter-2.pdf
• 16:19, 7 October 2013 Ningcao talk contribs uploaded File:20-Al-Sputtering-Film-Sputter-2.pdf
• 16:02, 7 October 2013 Ningcao talk contribs uploaded File:19-AlN-Sputtering-Film-Sputter-2.pdf
• 17:40, 3 October 2013 Ningcao talk contribs uploaded File:18-InP-based etching-Cl2N2Ar.pdf
• 15:19, 3 October 2013 Ningcao talk contribs uploaded File:17-InP&InGaAs etch-Cl2H2Ar-Unaxis-VLR.pdf
• 23:11, 2 October 2013 Ningcao talk contribs uploaded File:16-GaAs etch-ICP-2.pdf
• 20:47, 2 October 2013 Ningcao talk contribs uploaded File:14-AlAs-GR-cal etch-Unaxis ICP etcher.pdf
• 20:41, 2 October 2013 Ningcao talk contribs uploaded File:15-GaAs etch-Unaxis ICP etcher.pdf
• 18:26, 2 October 2013 Ningcao talk contribs uploaded File:13-GaAs-AlGaAs Etching-RIE-5.pdf
• 17:58, 2 October 2013 Ningcao talk contribs uploaded File:12-Plasma Etching of AlGaAs-Panasonic ICP-1-Etcher.pdf
• 22:49, 27 September 2013 Thibeault talk contribs uploaded File:Panasonic-1-Ti-Etch-Deep-RevA.pdf
• 18:53, 27 September 2013 Thibeault talk contribs uploaded File:Panasonic-1-Al-Etch-RevA.pdf
• 18:16, 27 September 2013 Ningcao talk contribs uploaded File:11-CZT etching-1.pdf
• 18:13, 27 September 2013 User account Bovington j talk contribs was created
• 00:02, 26 September 2013 Ray t talk contribs uploaded File:TystarMechDrawWaferBoat.pdf (Mechanical Drawing for 4" Wafer Boat for Tystar Furnace (From Tystar))
• 00:00, 26 September 2013 User account Ray t talk contribs was created
• 16:59, 25 September 2013 Ningcao talk contribs uploaded File:10-Si Etch using DRIE (single-step).pdf
• 21:13, 24 September 2013 Ningcao talk contribs uploaded File:09-Plasma Etching of GaN-UnaxisPM1.pdf
• 22:40, 19 September 2013 Ningcao talk contribs uploaded File:08-Plasma Etching of GaN-RIE5.pdf
• 22:42, 18 September 2013 Ningcao talk contribs uploaded File:07-GaN Etch-Panasonic-ICP-1.pdf
• 18:36, 17 September 2013 Ningcao talk contribs uploaded File:06-XeF2-etch-recipe.pdf
• 16:07, 17 September 2013 Ningcao talk contribs uploaded File:05-SiO2 Nano-structure Etch.pdf
• 16:06, 17 September 2013 Ningcao talk contribs deleted page File:05-SiO2 Nano-structure Etch.pdf
• 16:02, 17 September 2013 Ningcao talk contribs uploaded File:05-SiO2 Nano-structure Etch.pdf
• 16:01, 17 September 2013 Ningcao talk contribs deleted page File:05-SiO2 Nano-structure Etch.pdf
• 15:58, 17 September 2013 Ningcao talk contribs uploaded File:05-SiO2 Nano-structure Etch.pdf
• 15:58, 17 September 2013 Ningcao talk contribs deleted page File:05-SiO2 Nano-structure Etch.pdf
• 23:13, 13 September 2013 Ningcao talk contribs uploaded File:05-SiO2 Nano-structure Etch.pdf
• 23:08, 11 September 2013 Ningcao talk contribs uploaded File:02-ICP-PECVD-a-Si Film-90C.pdf
• 23:08, 11 September 2013 Ningcao talk contribs deleted page File:ICP-PECVD-a-Si-Recipe-90C.pdf
• 23:03, 11 September 2013 Ningcao talk contribs uploaded File:03-Amorphous-Si-PECVD-2.pdf
• 21:39, 11 September 2013 Ningcao talk contribs uploaded File:01-ICP-PECVD-a-Si-Deposition Recipe-250C.pdf