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Combined display of all available logs of UCSB Nanofab Wiki. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
- 23:19, 1 October 2026 John d talk contribs moved page Direct-Write I-Line Recipes to OLD Direct-Write I-Line Recipes (duplicate page, use this instead: https://wiki.nanofab.ucsb.edu/wiki/Direct-Write_Lithography_Recipes)
- 13:13, 30 September 2026 Barreraz talk contribs created page File:EBeam4 Planetary Fixture SOP 1-29-26V45.47 Final.pdf
- 13:13, 30 September 2026 Barreraz talk contribs uploaded File:EBeam4 Planetary Fixture SOP 1-29-26V45.47 Final.pdf
- 19:15, 29 September 2026 Sawyer l talk contribs uploaded a new version of File:Picomaster XF 200 SOP Rev A.pdf
- 19:14, 29 September 2026 Sawyer l talk contribs deleted page File:Picomaster Rough Draft.pdf (content was: "", and the only contributor was "Sawyer l" (talk))
- 13:38, 29 September 2026 Sawyer l talk contribs created page File:Picomaster XF 200 SOP Rev A.pdf
- 13:38, 29 September 2026 Sawyer l talk contribs uploaded File:Picomaster XF 200 SOP Rev A.pdf
- 21:10, 28 September 2026 Biljana talk contribs created page File:SiN 250C v2 - Std.xlsx
- 21:10, 28 September 2026 Biljana talk contribs uploaded File:SiN 250C v2 - Std.xlsx
- 19:05, 26 September 2026 Sawyer l talk contribs created page File:Picomaster Rough Draft.pdf
- 19:05, 26 September 2026 Sawyer l talk contribs uploaded File:Picomaster Rough Draft.pdf
- 22:32, 23 September 2026 John d talk contribs moved page Lift-off DUV Lift-off: UV6 imaging resist + LOR Underlayers to Lift-off DUV Lift-off: LOR Underlayers (need more generic process title)
- 22:31, 23 September 2026 John d talk contribs created page Lift-off DUV Lift-off: UV6 imaging resist + LOR Underlayers (alex spott's recipe) Tag: Visual edit
- 22:12, 23 September 2026 John d talk contribs uploaded a new version of File:Lor pds.pdf (newer version that also has LOR 30C spin curves)
- 22:08, 23 September 2026 John d talk contribs created page File:Lor pds.pdf (Microchem LOR underlayer "lift-off resist" data sheet from somewhere online)
- 22:08, 23 September 2026 John d talk contribs uploaded File:Lor pds.pdf (Microchem LOR underlayer "lift-off resist" data sheet from somewhere online)
- 22:05, 23 September 2026 Noahdutra talk contribs created page File:W FICP Etch 2.jpg
- 22:05, 23 September 2026 Noahdutra talk contribs uploaded File:W FICP Etch 2.jpg
- 22:05, 23 September 2026 Noahdutra talk contribs created page File:W FICP Etch 1.jpg
- 22:05, 23 September 2026 Noahdutra talk contribs uploaded File:W FICP Etch 1.jpg
- 03:45, 18 September 2026 User account Hoaly talk contribs was created
- 17:53, 15 September 2026 Barreraz talk contribs created page File:TM101 Standard Temperature Mapping (1-Temp Emissivity Method).pdf
- 17:53, 15 September 2026 Barreraz talk contribs uploaded File:TM101 Standard Temperature Mapping (1-Temp Emissivity Method).pdf
- 17:42, 15 September 2026 Barreraz talk contribs created page File:WFI -HS 102 Quick Start Guide - Standard Hot Spot.pdf
- 17:42, 15 September 2026 Barreraz talk contribs uploaded File:WFI -HS 102 Quick Start Guide - Standard Hot Spot.pdf
- 19:11, 7 September 2026 User account Ksimha talk contribs was created
- 22:40, 4 September 2026 John d talk contribs uploaded a new version of File:UCSB Service Agreement.pdf (Rev.6-2026 adds protofab to Attachment A)
- 17:32, 1 September 2026 Barreraz talk contribs created page File:PECVD1 SOP 8-26-26.pdf
- 17:32, 1 September 2026 Barreraz talk contribs uploaded File:PECVD1 SOP 8-26-26.pdf
- 15:55, 22 August 2026 John d talk contribs created page File:2026 CSMANTECH Paper-2366 - Foong Fatt - Machine Matching Methodology for Single-shot Lab to Lab Dry Etch Process Transfer.pdf (Machine Matching Methodology for Single-shot Lab to Lab Dry Etch Process Transfer Fatt Foong, Brian Thibeault, Noah Dutra, Demis D. John, Vraj Mehalana, Chandan Ramakrishnaiah, Shivakumar Bhaskaran, Jacky Tseng, Shimin Huang, Michio Aruga, Weldom Xie, Bokai Ma, Jeongho Ha, John Tamelier, Fubo Rao Conference: CS MANTECH Year: 2026 Topics Process Transfer Compound Semiconductors GaAs Design of Experiments InP Dry Etch Nanofabrication Abstract Small start-up companies benefit significantly...)
- 15:55, 22 August 2026 John d talk contribs uploaded File:2026 CSMANTECH Paper-2366 - Foong Fatt - Machine Matching Methodology for Single-shot Lab to Lab Dry Etch Process Transfer.pdf (Machine Matching Methodology for Single-shot Lab to Lab Dry Etch Process Transfer Fatt Foong, Brian Thibeault, Noah Dutra, Demis D. John, Vraj Mehalana, Chandan Ramakrishnaiah, Shivakumar Bhaskaran, Jacky Tseng, Shimin Huang, Michio Aruga, Weldom Xie, Bokai Ma, Jeongho Ha, John Tamelier, Fubo Rao Conference: CS MANTECH Year: 2026 Topics Process Transfer Compound Semiconductors GaAs Design of Experiments InP Dry Etch Nanofabrication Abstract Small start-up companies benefit significantly...)
- 23:04, 10 August 2026 John d talk contribs created page File:MLA LithoCal Chart screenshot.png
- 23:04, 10 August 2026 John d talk contribs uploaded File:MLA LithoCal Chart screenshot.png
- 20:51, 3 August 2026 User account Nanofab-ai-v1 talk contribs was created by Mehalana v talk contribs
- 16:14, 20 July 2026 Sawyer l talk contribs created page File:MLA150 SOP Rev O (LS).pdf
- 16:14, 20 July 2026 Sawyer l talk contribs uploaded File:MLA150 SOP Rev O (LS).pdf
- 18:59, 18 July 2026 John d talk contribs created page Maskless Aligner (Raith PicoMaster XF) (pasted MLA150 text)
- 22:10, 16 June 2026 John d talk contribs uploaded a new version of File:Microscope Training - Epi mode example - 2022-12-21 XYZ W31A after metal --0011.jpg (corrected scaling as compared to Dia imaging example)
- 20:21, 16 June 2026 John d talk contribs created page File:Microscope Training - Dia mode example - 2022-12-21 XYZ W31A after metal --0005.jpg
- 20:21, 16 June 2026 John d talk contribs uploaded File:Microscope Training - Dia mode example - 2022-12-21 XYZ W31A after metal --0005.jpg
- 20:19, 16 June 2026 John d talk contribs created page File:Microscope Training - Epi mode example - 2022-12-21 XYZ W31A after metal --0011.jpg
- 20:19, 16 June 2026 John d talk contribs uploaded File:Microscope Training - Epi mode example - 2022-12-21 XYZ W31A after metal --0011.jpg
- 20:13, 16 June 2026 John d talk contribs created page File:Nikon Microscope Training - front panel Epi Dia switch.png
- 20:13, 16 June 2026 John d talk contribs uploaded File:Nikon Microscope Training - front panel Epi Dia switch.png
- 16:33, 15 June 2026 Barreraz talk contribs created page File:EB1 Rotation Fixture SOP Final.pdf
- 16:33, 15 June 2026 Barreraz talk contribs uploaded File:EB1 Rotation Fixture SOP Final.pdf
- 14:45, 12 June 2026 Barreraz talk contribs created page File:EB1 Rotation Fixture SOP 6-12-26 Rev45.47.pdf
- 14:45, 12 June 2026 Barreraz talk contribs uploaded File:EB1 Rotation Fixture SOP 6-12-26 Rev45.47.pdf
- 21:20, 10 June 2026 Biljana talk contribs created page File:Partial dicing.jpeg
- 21:20, 10 June 2026 Biljana talk contribs uploaded File:Partial dicing.jpeg
