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Combined display of all available logs of UCSB Nanofab Wiki. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
- 23:47, 30 January 2014 Ningcao talk contribs deleted page File:26-Dry Etch of Unaxis ICP-grown SiO2 using Vapor HF tool-2.pdf
- 23:47, 30 January 2014 Ningcao talk contribs deleted page File:25-Dry Etch of Unaxis ICP-grown SiO2 using Vapor HF tool-1.pdf
- 23:44, 30 January 2014 Ningcao talk contribs uploaded File:SPTS-Primaxx uEtch Presentation-b.pdf
- 23:41, 30 January 2014 Ningcao talk contribs uploaded File:SPTS-Primaxx uEtch Presentation-a.pdf
- 19:39, 30 January 2014 Ningcao talk contribs uploaded File:IMG 2416 1.jpg
- 19:38, 30 January 2014 Ningcao talk contribs deleted page File:VHF-uEtch.jpeg
- 19:28, 30 January 2014 Ningcao talk contribs uploaded File:VHF-uEtch.jpeg
- 19:23, 30 January 2014 Ningcao talk contribs deleted page File:IMG 2416 1.jpeg
- 19:20, 30 January 2014 Ningcao talk contribs uploaded File:IMG 2416 1.jpeg
- 19:17, 30 January 2014 Ningcao talk contribs deleted page File:VHF-uETCH.jpg
- 19:17, 30 January 2014 Ningcao talk contribs deleted page File:IMG 2416 1.jpeg
- 19:09, 30 January 2014 Ningcao talk contribs uploaded File:IMG 2416 1.jpeg
- 18:13, 30 January 2014 Ningcao talk contribs uploaded File:VHF-uETCH.jpg
- 17:06, 30 January 2014 Ningcao talk contribs uploaded File:26-Dry Etch of Unaxis ICP-grown SiO2 using Vapor HF tool-2.pdf
- 17:01, 30 January 2014 Ningcao talk contribs uploaded File:25-Dry Etch of Unaxis ICP-grown SiO2 using Vapor HF tool-1.pdf
- 18:33, 28 January 2014 Thibeault talk contribs uploaded File:Nanoinprint-Lithopgraphy-UV-Low-Pressure-Temperature-Ormostamp-PDMS-RevA.docx
- 17:58, 28 January 2014 Thibeault talk contribs uploaded File:OrmoPrime-NIL-Adhesion-RevA.pdf
- 17:56, 28 January 2014 Thibeault talk contribs uploaded File:OrmoStamp-NIL-Lithography-UV-Soft-RevA.pdf
- 17:12, 28 January 2014 Thibeault talk contribs uploaded File:Mr-UVCur21.pdf
- 17:59, 27 January 2014 Thibeault talk contribs uploaded File:Lithography-BCB-photo-lowk-dielectric-spinon-4024-40-revA.docx
- 23:33, 3 December 2013 User account Gast j talk contribs was created
- 21:40, 14 November 2013 User account Park ju talk contribs was created
- 19:23, 5 November 2013 Ningcao talk contribs uploaded File:24-Ni and Ta Films using Sputter-3.pdf
- 23:09, 4 November 2013 Ningcao talk contribs uploaded File:23-Tungsten Sputtering Film-Sputter-4.pdf
- 20:49, 2 November 2013 Bovington j talk contribs uploaded File:Wet Etching of ALD Al2O3 Plasma 300C.xls (This is a list of wet etch experiment which people can feel free to add to.)
- 17:22, 28 October 2013 Ningcao talk contribs uploaded File:22-TiO2-Film-Sputter-2.pdf
- 23:38, 24 October 2013 Thibeault talk contribs uploaded File:Panasonic 1-SiC-ICP-RIE-Etch-Plasma-SF6-RevA.pdf
- 22:25, 24 October 2013 Thibeault talk contribs uploaded File:Panasonic1-sapphire-etch-RIE-Plasma-BCl3-ICP-RevA.pdf
- 20:40, 24 October 2013 Thibeault talk contribs uploaded File:Panasonic1-GaAs-PhotonicCrystal-RIE-Plasma-Nanoscale-Etch-RevA.pdf
- 18:34, 24 October 2013 Thibeault talk contribs uploaded File:Panasonic1-GaAs-Via-Etch-Plasma-RIE-Fast-DRIE-RevA.pdf
- 17:14, 24 October 2013 Thibeault talk contribs uploaded File:Panasonic1-GaN-AlGaN-Selective-Etch-Plasma-RIE-ICP-RevA.pdf
- 00:05, 24 October 2013 Thibeault talk contribs uploaded File:RIE2-ITO-Etch-MHA-Plasma-RevA.pdf
- 23:40, 23 October 2013 Thibeault talk contribs uploaded File:RIE2-InGaAs-InP-InAlAs-Etch-Plasma-RIE-RevA.pdf
- 23:11, 23 October 2013 Thibeault talk contribs uploaded File:Panasonic1-TiW-W-Etch-Plasma-RIE-RevA.pdf
- 22:05, 22 October 2013 Thibeault talk contribs uploaded File:Panasonic1-SiN-Etch-Plasma-CF4-O2-ICP-revA.pdf
- 18:40, 22 October 2013 Thibeault talk contribs uploaded File:Panasonic2-ICP-Plasma-Etch-SiN-nanoscale-rev1.pdf
- 18:18, 22 October 2013 Thibeault talk contribs uploaded File:Panasonic2-ICP-Plasma-Etch-SiO2-nanoscale-rev1.pdf
- 17:37, 10 October 2013 Ningcao talk contribs uploaded File:21-Au-Sputter-film-recipes-Sputter-2.pdf
- 16:19, 7 October 2013 Ningcao talk contribs uploaded File:20-Al-Sputtering-Film-Sputter-2.pdf
- 16:02, 7 October 2013 Ningcao talk contribs uploaded File:19-AlN-Sputtering-Film-Sputter-2.pdf
- 17:40, 3 October 2013 Ningcao talk contribs uploaded File:18-InP-based etching-Cl2N2Ar.pdf
- 15:19, 3 October 2013 Ningcao talk contribs uploaded File:17-InP&InGaAs etch-Cl2H2Ar-Unaxis-VLR.pdf
- 23:11, 2 October 2013 Ningcao talk contribs uploaded File:16-GaAs etch-ICP-2.pdf
- 20:47, 2 October 2013 Ningcao talk contribs uploaded File:14-AlAs-GR-cal etch-Unaxis ICP etcher.pdf
- 20:41, 2 October 2013 Ningcao talk contribs uploaded File:15-GaAs etch-Unaxis ICP etcher.pdf
- 18:26, 2 October 2013 Ningcao talk contribs uploaded File:13-GaAs-AlGaAs Etching-RIE-5.pdf
- 17:58, 2 October 2013 Ningcao talk contribs uploaded File:12-Plasma Etching of AlGaAs-Panasonic ICP-1-Etcher.pdf
- 22:49, 27 September 2013 Thibeault talk contribs uploaded File:Panasonic-1-Ti-Etch-Deep-RevA.pdf
- 18:53, 27 September 2013 Thibeault talk contribs uploaded File:Panasonic-1-Al-Etch-RevA.pdf
- 18:16, 27 September 2013 Ningcao talk contribs uploaded File:11-CZT etching-1.pdf
