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This special page shows the last uploaded files.
- 39-Medium-stress SiNx at 100C using Unaxis ICP deposition tool.pdf Ningcao
19:07, 30 June 2015
; 48 KB
- 38-High-stress SiNx at 100 C using Unaxis ICP deposition tool.pdf Ningcao
18:55, 30 June 2015
; 43 KB
- 37-Low-stress SiNx at 100 C using Unaxis ICP deposition tool.pdf Ningcao
18:39, 30 June 2015
; 169 KB
- 34-High-stress SiNx at 250 C using Unaxis ICP deposition tool.pdf Ningcao
22:59, 29 June 2015
; 10 KB
- 35-Low-stress SiNx at 250 C using Unaxis ICP deposition tool.pdf Ningcao
22:27, 29 June 2015
; 118 KB
- New Adv PECVD-LS Nitride2 300C standard recipe LS Nitride2 standard recipe.pdf Biljana
18:57, 9 January 2015
; 378 KB
- New Adv PECVD-Nitride2 300C standard recipe Nitride2 Standard Recipe.pdf Biljana
18:56, 9 January 2015
; 373 KB
- New Adv PECVD OXIDE 300C standard recipe OXIDE Standard Recipe.pdf Biljana
18:54, 9 January 2015
; 653 KB
- New PECVD1-SiO2-standard recipe 2014 SiO2 standard recipe.pdf Biljana
22:03, 8 January 2015
; 594 KB
- SiN-AJA-1-Reactive-Sputtering-Power-Flow-AFM-Rate-Index-rev1.pdf Thibeault
19:41, 23 December 2014
; 336 KB
- SiO2-AJA-1-Reactive-Sputter-Power-Flow-AFM-Roughness-rev1.pdf Thibeault
19:00, 23 December 2014
; 518 KB