User contributions
Jump to navigation
Jump to search
- 14:50, 31 May 2019 diff hist -572 Stepper 1 (GCA 6300) - Standard Operating Procedure wafer loading Tag: Visual edit
- 14:37, 31 May 2019 diff hist +941 Stepper 2 (AutoStep 200) Operating Procedures Setting up the job Tag: Visual edit
- 14:24, 31 May 2019 diff hist -2 Stepper 2 (AutoStep 200) Operating Procedures →Loading a wafer into the system Tag: Visual edit
- 14:23, 31 May 2019 diff hist +2,111 Stepper 2 (AutoStep 200) Operating Procedures loading the wafer Tag: Visual edit
- 13:42, 31 May 2019 diff hist -1,458 Stepper 2 (AutoStep 200) Operating Procedures →Reticle Loading and Unloading Tag: Visual edit
- 13:08, 31 May 2019 diff hist +1,995 Stepper 1 (GCA 6300) - Standard Operating Procedure wafer loading Tag: Visual edit
- 13:02, 31 May 2019 diff hist -86 Stepper 1 (GCA 6300) - Standard Operating Procedure →Reticle Loading and Unloading Tag: Visual edit
- 13:01, 31 May 2019 diff hist +28 Stepper 1 (GCA 6300) - Standard Operating Procedure →Reticle Loading and Unloading Tag: Visual edit
- 12:58, 31 May 2019 diff hist +3,877 Stepper 1 (GCA 6300) - Standard Operating Procedure gca 6300 cleaning, loading reticle Tag: Visual edit
- 10:58, 31 May 2019 diff hist +7 N Stepper 1 (GCA 6300) - Standard Operating Procedure work in progress icon
- 10:57, 31 May 2019 diff hist +131 Stepper 1 (GCA 6300) →Operating Procedures: link to new SOP in progress Tag: Visual edit
- 10:53, 31 May 2019 diff hist +7 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences work in progress
- 10:53, 31 May 2019 diff hist +125 Stepper 2 (AutoStep 200) →Operating Procedures: link to SOP Tag: Visual edit
- 10:51, 31 May 2019 diff hist +2,893 Stepper 2 (AutoStep 200) Operating Procedures →Reticle Loading/Unloading: Work In Progress Tag: Visual edit: Switched
- 10:50, 31 May 2019 diff hist 0 N Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences blank page Tag: Visual edit
- 10:49, 31 May 2019 diff hist +67 Stepper 2 (AutoStep 200) →Operating Procedures: link to Job Programming Tag: Visual edit
- 10:24, 31 May 2019 diff hist +956 Stepper 2 (AutoStep 200) Operating Procedures initial sections
- 14:40, 26 March 2019 diff hist +2 Surface Analysis (KLA/Tencor Surfscan) Tag: Visual edit
- 14:40, 26 March 2019 diff hist -22 Surface Analysis (KLA/Tencor Surfscan) Tag: Visual edit
- 14:39, 26 March 2019 diff hist -75 Surface Analysis (KLA/Tencor Surfscan) Tag: Visual edit
- 14:38, 26 March 2019 diff hist +276 Surface Analysis (KLA/Tencor Surfscan) standard recipes info Tag: Visual edit
- 14:19, 26 March 2019 diff hist +15 N File:UCSBTEST2 for small particles.png current
- 14:06, 26 March 2019 diff hist +26 N File:UCSBTEST.png current
- 13:40, 26 March 2019 diff hist +72 N File:UCSBTEST2 - gain4 for (0.160-1.60)um particles.png current
- 15:54, 25 March 2019 diff hist -105 Stepper 1 (GCA 6300) practicing editing page Tag: Visual edit
- 15:53, 25 March 2019 diff hist +74 Stepper 1 (GCA 6300) →Operating Procedures: stepper operating procedure Tag: Visual edit
- 15:22, 25 March 2019 diff hist +31 Stepper 1 (GCA 6300) →Operating Procedures: standard operating procedure Tag: Visual edit
- 15:09, 25 March 2019 diff hist +152 PECVD Recipes →SiO2 deposition (PECVD #1): thickness uniformity Tag: Visual edit
- 15:08, 25 March 2019 diff hist +140 PECVD Recipes →SiN deposition (PECVD #1): thickness uniformity Tag: Visual edit
- 15:03, 25 March 2019 diff hist +136 PECVD Recipes →SiO2 deposition (PECVD #1): pecvd 1-sio2 data Tag: Visual edit
- 15:02, 25 March 2019 diff hist +99 PECVD Recipes →SiN deposition (PECVD #1): data for pecvd sin Tag: Visual edit
- 14:54, 25 March 2019 diff hist -139 PECVD Recipes →SiN deposition (PECVD #1): data 2019 Tag: Visual edit
- 14:53, 25 March 2019 diff hist +164 PECVD Recipes →SiN deposition (PECVD #1): data 2019 Tag: Visual edit
- 15:05, 12 March 2019 diff hist 0 PECVD Recipes →SiO2 deposition (PECVD #2) Tag: Visual edit
- 15:05, 12 March 2019 diff hist 0 PECVD Recipes →SiN deposition (PECVD #2) Tag: Visual edit
- 15:03, 12 March 2019 diff hist -6 PECVD Recipes →SiN deposition (PECVD #2): correcting data for 2019 Tag: Visual edit
- 15:00, 12 March 2019 diff hist -6 PECVD Recipes →SiO2 deposition (PECVD #2): correct link for 2019 Tag: Visual edit
- 16:09, 2 January 2019 diff hist +139 PECVD Recipes →PECVD 2 (Advanced Vacuum)
- 16:03, 2 January 2019 diff hist 0 N File:STD SiO2 5-9-18.pdf current
- 16:03, 2 January 2019 diff hist -13 PECVD Recipes →SiO2 deposition (PECVD #2)
- 15:59, 2 January 2019 diff hist +39 PECVD Recipes →SiO2 deposition (PECVD #2)
- 15:57, 2 January 2019 diff hist -39 PECVD Recipes →SiO2 deposition (PECVD #2)
- 15:53, 2 January 2019 diff hist -1 PECVD Recipes →SiO2 deposition (PECVD #2)
- 15:53, 2 January 2019 diff hist +254 PECVD Recipes →SiO2 deposition (PECVD #2)
- 15:50, 2 January 2019 diff hist +264 PECVD Recipes →SiN deposition (PECVD #2)
- 15:49, 2 January 2019 diff hist 0 N File:STD Oxide 5-9-18 Dep.recipe.pdf current
- 15:48, 2 January 2019 diff hist -5 PECVD Recipes →SiO2 deposition (PECVD #2)
- 15:48, 2 January 2019 diff hist +65 PECVD Recipes →SiO2 deposition (PECVD #2)
- 15:47, 2 January 2019 diff hist +12 PECVD Recipes →SiO2 deposition (PECVD #2)
- 15:46, 2 January 2019 diff hist +3 PECVD Recipes →SiO2 deposition (PECVD #2)