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- 09:42, 19 March 2020 diff hist -8 Stepper 1 (GCA 6300) - Standard Operating Procedure current
- 09:30, 19 March 2020 diff hist +121 Stepper 1 (GCA 6300) - Standard Operating Procedure →Resist spin coating and cleaning the back-side of wafer
- 09:20, 19 March 2020 diff hist -102 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a FOCUS and\or EXPOSURE matrix
- 09:19, 19 March 2020 diff hist +73 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a FOCUS and\or EXPOSURE matrix
- 09:14, 19 March 2020 diff hist -1 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a FOCUS and\or EXPOSURE matrix
- 22:33, 18 March 2020 diff hist +2 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a JOB-Normal Operation
- 22:22, 18 March 2020 diff hist -1 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a JOB-Normal Operation
- 22:20, 18 March 2020 diff hist -9 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a JOB-Normal Operation
- 22:16, 18 March 2020 diff hist +8 Stepper 1 (GCA 6300) - Standard Operating Procedure →Running a JOB-Normal Operation
- 22:14, 18 March 2020 diff hist +30 Stepper 1 (GCA 6300)
- 11:08, 10 March 2020 diff hist 0 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 15:36, 27 February 2020 diff hist -16 PECVD Recipes →SiN deposition (Unaxis VLR)
- 15:35, 27 February 2020 diff hist +270 PECVD Recipes →SiN deposition (Unaxis VLR)
- 15:32, 27 February 2020 diff hist -2 PECVD Recipes →SiN deposition (Unaxis VLR)
- 15:32, 27 February 2020 diff hist -131 PECVD Recipes →SiN deposition (Unaxis VLR)
- 15:31, 27 February 2020 diff hist +1 PECVD Recipes →SiN deposition (Unaxis VLR)
- 15:30, 27 February 2020 diff hist +127 PECVD Recipes →SiN deposition (Unaxis VLR)
- 15:29, 27 February 2020 diff hist +125 PECVD Recipes →SiN deposition (Unaxis VLR)
- 15:27, 27 February 2020 diff hist +144 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 15:27, 27 February 2020 diff hist -124 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:26, 27 February 2020 diff hist 0 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:26, 27 February 2020 diff hist +1 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:26, 27 February 2020 diff hist +123 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:24, 27 February 2020 diff hist -2 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:23, 27 February 2020 diff hist +260 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:23, 27 February 2020 diff hist -261 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:22, 27 February 2020 diff hist +150 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:21, 27 February 2020 diff hist +1 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:21, 27 February 2020 diff hist +149 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:19, 27 February 2020 diff hist +261 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:18, 27 February 2020 diff hist +134 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:17, 27 February 2020 diff hist +136 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 13:23, 27 February 2020 diff hist +1 PECVD Recipes →SiN deposition (Unaxis VLR)
- 13:23, 27 February 2020 diff hist +4 PECVD Recipes →SiN deposition (Unaxis VLR)
- 13:22, 27 February 2020 diff hist -1 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 15:00, 6 February 2020 diff hist +3 PECVD Recipes →SiO2 deposition (PECVD #1)
- 15:00, 6 February 2020 diff hist +9 PECVD Recipes →SiN deposition (PECVD #1)
- 14:59, 6 February 2020 diff hist +97 PECVD Recipes →SiN deposition (PECVD #1)
- 14:58, 6 February 2020 diff hist +1 PECVD Recipes →SiO2 deposition (PECVD #1)
- 14:58, 6 February 2020 diff hist +100 PECVD Recipes →SiO2 deposition (PECVD #1)
- 14:55, 6 February 2020 diff hist -9 PECVD Recipes →Standard Recipe
- 14:53, 6 February 2020 diff hist +1 PECVD Recipes →Standard Recipe
- 14:53, 6 February 2020 diff hist +110 PECVD Recipes →Standard Recipe
- 14:52, 6 February 2020 diff hist +1 PECVD Recipes →Standard Recipe
- 14:51, 6 February 2020 diff hist +113 PECVD Recipes →SiN deposition (PECVD #2)
- 14:49, 6 February 2020 diff hist -141 PECVD Recipes →Standard Recipe
- 14:48, 6 February 2020 diff hist +107 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 14:46, 6 February 2020 diff hist -1 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 14:46, 6 February 2020 diff hist +2 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
- 14:45, 6 February 2020 diff hist +141 PECVD Recipes →Standard Recipe