E-Beam #2 is down - Update
The replacement cyro pump had a leak in the N2 purge connection. After that was sorted out I was able to get the cryo going. However, it appears there is an issue with this cryo as it is pumping very slow. I am going to let it pump overnight but will most likely change it out in the morning. As of right now, no ETA on when the tool will be available.
-Lee
//Vraj Mehalana 21:14, 4 August 2025 (UTC)
ALD: Chamber 1
I will be back on Thursday. In the meantime, the users can run the BDEAS recipe on the other chamber.
//Vraj Mehalana 21:13, 4 August 2025 (UTC)
MLA Up
The MLA is up, service has finished. OptAF is in-spec, but PneuAF currently has a shift down to -18 defocus - you will need to adjust your focus via FEM calibration.
//Vraj Mehalana 21:13, 4 August 2025 (UTC)
EBeam1 is UP
EBeam1 is back UP
Late this morning, the hoist motor was finally delivered, and as soon as it arrived I started the installation.
I then tested the Egun operation due to the new high voltage feed throughs that were installed earlier this week.
All tests were completed without issue. System UP.
// 04:23, 25 July 2025 (UTC)
SignupMonkey + Wiki: Off-Campus Access
Due to a DDoS attack affecting the Signupmonkey server, we have restricted access to the website to US locations only, including both the Nanofab Wiki and Signupmonkey.
If you are off-campus and experiencing issues, please utilize the UCSB VPN to access our sites. Here are the installation instructions for VPN on your device. You will need your UCSB NetID for download and installation - you would have received a UCSB NetID when you started using the NanoFab:
https://it.ucsb.edu/ivanti-secure-access-campus-vpn/get-connected-campus-vpn
-- Vraj
// Demis D. John 20:08, 22 April 2025 (UTC)
Suss SB6-8E
This tool is down indefinitely. We are sourcing manual bonding fixtures, and already have a 1cm bonding fixture for NanoFab users to use - please contact Demis D. John for more information.
// Demis D. John 04:28, 5 August 2025 (UTC)
ICP1 Down
The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps.
//Vraj Mehalana 14:17, 1 March 2024 (PST)
