Template:Announcements

From UCSB Nanofab Wiki
Revision as of 19:56, 28 May 2019 by John d (talk | contribs) (deleted Lab Open fan exhaust maintenance)
Jump to navigation Jump to search

Equipment Status

Suss Bonder

Suss Bonder is DOWN. Suss field service is sourcing replacement parts for the bonder repair. An update will be sent out once we have a date scheduled for the service. Silva 10:45, 12 April 2019 (PDT)

SLR Fluorine ICP Etch

The turbo upgrade has been postponed. I will update you once the new installation date has been established. Silva 10:19, 28 May 2019 (PDT)

GCA Autostep June Maintenance

The vendor will be working on the GCA Autostep 200 starting Monday June 10, 2019 at 9:00 am. Service will be complete Wednesday June 12, 2019 early evening. The system will be available in the evening during each day of service. Please plan your process accordingly. Silva 10:24, 28 May 2019 (PDT)

GCA 6300 June Maintenance

The GCA 6300 will be serviced Thursday June 13, 2019 starting at 8:30 am. The service will be finished late afternoon. Please schedule your process accordingly. Silva 10:24, 28 May 2019 (PDT)

ASML Stepper #3: Periodic Maintenance

ASML will be performing their quarterly maintenance on Stepper #3 from Monday June 17th to Friday June 21st. Exact days may vary, we will email updates when we know exactly which days the tool will be closed. // John d 12:55, 28 May 2019 (PDT)