Tool List

Lithography

• Suss Aligners
• IR Aligner
• DUV Flood Expose
• Ovens
• Stepper 1
• Stepper 2
• Stepper 3
• E-Beam Lithography System

Vacuum Deposition

• E-Beam 1
• E-Beam 2
• E-Beam 3
• E-Beam 4
• Sputter 1
• Sputter 2
• Sputter 3
• Sputter 4
• Sputter 5
• PECVD 1
• PECVD 2
• Unaxis VLR ICP-PECVD
• IBD
• Molecular Vapor Deposition
• Atomic Layer Deposision

Dry Etch

• RIE 1
• RIE 2
• RIE 3
• RIE 5
• Si Deep RIE
• Ashers
• VLR Etch
• ICP Etch 1
• ICP Etch 2
• UV Ozone Reactor
• Plasma Clean
• XeF2 Etch
• Plasma Activation Tool

Wet Processing

• Wet Benches
• Gold Plating Bench
• Critical Point Dryer
• Spin Rinse Dryer

Thermal Processing

• Wet Benches
• Gold Plating Bench
• Critical Point Dryer
• Spin Rinse Dryer

Packaging

• Flip-Chip Bonder
• Vacuum Sealer
• Dicing Saw

Inspection, Test and Characterization

• Field Emission SEM 1
• Field Emission SEM 2
• Step Profile
• Step Profilometer
• Ellipsometer
• Microscopes
• Probe Station & Curve Tracer
• Optical Film Thickness (Filmetrics)
• Scanning Probe Microscope
• Tencor Flexus Film Stress
• Optical Film Thickness (Nanometric)
• SEM Sample Coater
• Surface Analysis
• Photo-emission & IR Microscope
• Ellipsometer (Woollam)
• Goniometer
• 4-Point Probe Resistivity Mapper