Deep UV Optical Microscope (Olympus)

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Deep UV Optical Microscope (Olympus)
Tool Type Inspection, Test and Characterization
Location Bay 7
Supervisor Tony Bosch
Supervisor Phone (805) 893-3486
Supervisor E-Mail bosch@ece.ucsb.edu
Description
Manufacturer Olympus


About

This system does general purpose imaging in the visible and also has high resolution/high magnification DUV imaging using 250nm light. Surface features less than 100nm can be resolved.

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