ASML 5500: Recovering from an Error
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- Do NOT exit task streaming!
- If you exit the Task Streaming screen, the batch will not be able to be aborted, usually requiring a software reboot.
- Abort the Batch: Choose the task from the Task List, click Batch > "Abort"
- In the following popup window, click "Remove Wafer from Litho Cluster"
- Wait for the task status to change from "Aborting" to "Aborted"
Your wafer should be removed to Port #2, and the task should state "Aborted" on the task list.