Surface Analysis (KLA/Tencor Surfscan)

Surface Analysis (KLA/Tencor Surfscan) Tool Type Inspection, Test and Characterization Location Bay 5 Supervisor Biljana Stamenic Supervisor Phone (805) 893-4002 Supervisor E-Mail biljana@ece.ucsb.edu Description Surface Analysis KLA/Tencor Surfscan Manufacturer Tencor

About

This system uses a laser-based scattering method to count size and distribution of particles (or other scattering defects) on a flat wafer surface. It can scan wafers in size from 4 to 6 inches.

Documentation

• Standard Operating Procedure
• Operations Manual
  • For detailed measurement info, it is highly recommended that you read the manual.
• Surfscan Info
• Standard recipes

  

  UCSBTEST2 for big size particles (1.6-28.0)um

  

  UCSBTEST2 for small size particles (0.16-1.6)um