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Equipment Info Recipes + Processes Data + Info Other Links Lithography Deposition Dry Etch Wet Process Thermal Process Packaging/Bonding Metrology/Test Lithography Deposition Dry Etching Wet Etching Thermal Process Packaging/Bonding Process Control Data Calculators + Utilities Nanofab Data + Info Research + Publications Tech Talks SignUpMonkey Get into the Lab Fabrication Services NanoTech Homepage UCSB ECE Dept. EBeam4 is up EBeam4 is back up. The overnight regen of the cryo was completed this morning. I then tested the operation of the hoist numerous times without issue. I tested the EBeam by running 200A of Ti without issue. System UP //10:36, 30 May 2024 (PDT) Stepper #1 (GCA 6300) - Tool availability Stepper #1 (6300) will be undergoing maintenance and be unavailable the following dates and times: 6-18-24 at 8:00am Till 6-20-24 at 5:00pm Please plan your processing activities accordingly. //13:32, 1 June 2024 (PDT) Stepper #2 (GCA Autostep 200) - Tool availability Stepper #2 (AutoStep 200) will be undergoing maintenance and be unavailable the following dates and times: 6-21-24 at 8:00am Till 6-21-24 at 5:00pm Please plan your processing activities accordingly. Thanks Bill Millerski UCSB //13:32, 1 June 2024 (PDT) Stepper #3 (ASML DUV) - System UP and calibrated We have finished calibrations, System is up. Reminder to check/recalibrate your exposure dose. Focus should be the same, but beam optics changeout will affect dose. //Vraj Mehalana 11:17, 24 May 2024 (PDT) Unaxis VLR still Down The chiller has a decent sized ball of ice inside of it. I need to let that melt off before I can do a proper diagnosis of what is causing the high pressure cut off to trip when the refrigerant pressures seem normal. //13:29, 1 June 2024 (PDT) //Vraj Mehalana 11:17, 24 May 2024 (PDT) Atomic Force Microscope (Dimension ICON) - 05/17: System UP Head was repaired and returned today. A quick test showed correct performance. Note also that the pin board has been repaired so all 4 pins are now present. Lets keep it that way so please be careful when loading the tip holder! //Vraj Mehalana 13:46, 20 May 2024 (PDT) MA6 TSA is down - Update Due to unforeseen circumstances our FSE will not be onsite next week to work on the TSA microscope. They have rescheduled with us for Thursday of the following week, 6/13. I apologize for the inconvenience. Per my previous email, there is a MA6 available for use at CNSI. Here is a link to the webpage for their tools: https://www.cnsi.ucsb.edu/facilities/quantum-structures/nanofabrication -Lee //15:59, 22 May 2024 (PDT) Velion FIB Tool DOWN Raith service are installing and aligning a new GaBiLi source. The Velion FIB column is not available to users until further notice. //Vraj Mehalana 10:58, 30 April 2024 (PDT) ICP1 Down The board we were waiting on arrived, but it did not resolve the tool issue. We are working with Panasonic on the next steps. //Vraj Mehalana 14:17, 1 March 2024 (PST) Lab Access Changes: Symmetry App The iris scanner has been decommissioned. Please use the card reader which supports: -Physical card -Mobile phone via Symmetry App //10:54, 23 May 2024 (PDT) Wafer Bonder, (Suss SB6-8E) SUSS aims to be on site in early February. We’ll will send out an email once I get confirmation for a specific date. //Vraj Mehalana 14:23, 13 December 2023 (PST) General Information NanoFab Users are responsible for understanding their chemistry, risks and usage of various chemicals. Please read the MSDS sheets for the chemicals you use! Users can add qualified processing data to the Wiki pages; see the Editing_Tutorials for how to do that. Supervisors of individuals using the facility, e.g., UCSB Principal Investigators and external user managers are ultimately responsible for ensuring that their supervisees have the appropriate knowledge and training to work safely in the facility. They are also responsible for ensuring that all applicable regulatory requirements are met. This includes having a compliant "Chemical Hygiene Plan" per OSHA regulations. The information on this site should be considered as providing "general supporting information" to the Chemical Hygiene Plan of a particular supervisor. Supervisors can reference all or some of this site information within their Plans. UCSB EH&S can provide assistance to supervisors in preparing their Plans. News & Announcements News from the U.C. Santa Barbara Nanofabrication Facility. NanoFab staff awarded Goleta's Innovator of the Year 2023 NanoFab staff member Demis D. John has been awarded the City of Goleta's "Innovator of the Year" for 2023! The award stems from the UCSB Nanofab's impact on the communities of Santa Barbara County and surrounding regions, in enabling cutting edge technology companies to thrive, which also enables many local careers in advanced high-tech. See the full announcement by the Santa Barbara South Coast Chamber of Commerce. //John d 13:58, 7 November 2023 (PST) NanoFab Featured in Regional Tech Videos The UCSB NanoFab is showcased as a driver of innovation and enabler of the regional high-tech industry. See the videos here: Santa Barbara County: This is TechTopia UCSB NanoFab: An Innovation Center // John d 09:26, 1 November 2023 (PST) CHIPS Act Award Announced to USC and UCSB NanoFab U.S. Congressman Salud Carbajal congratulates UCSB and the NanoFab on receiving a CHIPS & Science Act award, as part of the California DREAMS Hub (Microelectronics Commons) led by USC. // Demis 12:06, 4 October 2023 (PDT) JEOL SEM's Installed Both SEM's have been replaced with new JEOL SEM's #1 and SEM #2. SEM#1 has the NABITY lithography system installed, and SEM #2 has always-on EDAX elemental analysis. Contact the supervisor, Aidan Hopkins, for more information. // John d 18:31, 20 September 2023 (PDT) Wide FOV Microscope Installed We have installed an AmScope stereo microscope in Bay 4 for wide field-of-view digital imaging/capture, with >2cm of FOV currently available. Wiki page here: AmScope Wide Field of View Stereoscope // John d 14:52, 19 April 2023 (PDT) Loomis Scribe & Break installed We have installed a new Loomis LSD-155LT Automated Scribe & Break Cleaving tool in the Back-End Processing lab. Qualifications are underway. Contact supervisor, Aidan Hopkins, for more information. // John d 09:41, 16 April 2023 (PDT) Dektak XT installed We have replaced the old Dektak 6M with a new Dektak XT profilometer. This tool will provide robust, fast metrology for rapid in-process topography inspection. // John d 10:41, 25 January 2023 (PST) New Process Control data tables We have added "Process Control Data" - data on deposition/etch repeatability - to a number of our highest used etchers and deposition tools. The datasheets are linked in multiple places, mainly on the Recipes pages for each tool, or on the general Recipes pages for Deposition Recipes or Etch Recipes. // John d 16:07, 5 January 2023 (PST) See older articles at this link

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