Mike Silva
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Mike Silva
Position
Senior Development Engineer
Room Number
1109B
Phone
(805) 839-3918x219
Cell
(805) 245-9356
E-Mail
silva@ece.ucsb.edu
About
Father of 4.
Current Work
Nope.
Tools
Mike Silva is in charge of the following tools:
DUV Flood Expose
High Temp Oven (Blue M)
Sputter 5 (Lesker AXXIS)
PECVD 2 (Advanced Vacuum)
Thermal Evap 1
Ion Beam Deposition (Veeco NEXUS)
ICP Etch 2 (Panasonic E640)
Plasma Clean (Gasonics 2000)
HF Vapor Etch
Tube Furnace Wafer Bonding (Thermco)
Step Profile (Dektak IIA)
Step Profilometer (Dektak 6M)
Ellipsometer (Rudolph)
Film Stress (Tencor Flexus)
Optical Film Thickness (Nanometric)
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