PECVD1-SIN Standard Recipe (PlasmaTherm 790)

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PECVD 1 (PlasmaTherm 790)

https://docs.google.com/spreadsheet/ccc?key=0AuBs1GfMrpnXcEdXanZQNko3X0lUcHhVUlNyYnVDUkE&usp=sharing PECVD1-SiN Standard recipe=0

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