PECVD1 Recipes

PECVD 1 (PlasmaTherm 790)

SiN deposition (PECVD #1)

• SiN Standard Recipe
• SiN Data (Deposition rate, Refractive index, Stress, HF etch rate)
• SiN Data April 2014
• SiN 1000A Thickness uniformity 2014
• Low Stress Si₃N₄ - Variable Stress Recipes
• Low Stress Si₃N₄ - Variable Stress Plot

SiO₂ deposition (PECVD #1)

• SiO₂ Standard Recipe
• SiO₂ Data (Deposition rate, Refractive Index, Stress, HF etch rate)
• SiO₂ Data April 2014
• SiO₂ 1000A Thickness uniformity 2014

SiO_xN_y deposition (PECVD #1)

• SiO_xN_y Deposition Recipes - Varying N/O Ratio
• SiO_xN_y Stress/Index vs. O/N Ratio