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• 20:12, 11 February 2022 John d talk contribs deleted page SiO2 Etch Test using CF4/CHF3 (old FL-ICP data - consolidated into new page "https://wiki.nanotech.ucsb.edu/wiki/Test_Data_of_Etching_SiO2_with_CHF3/CF4-Fluorine_ICP_Etcher")