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Combined display of all available logs of UCSB Nanofab Wiki. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
- 20:20, 11 February 2022 John d talk contribs deleted page Test Data of etching SiO2 with CHF3/CF4/O2 (using this recipe only for Florine etch of the underneath layer) (pasted data into https://wiki.nanotech.ucsb.edu/wiki/Test_Data_of_etching_SiO2_with_CHF3/CF4-ICP1)