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• YES Recipe Screenshots: STD-O2
  669 bytes (132 words) - 12:12, 30 November 2023

• File:PECVD1-LS SIN recipe 2014.pdf (1.03 MB) - 16:37, 5 December 2014

• File:PECVD1-LS SION recipe 2014.pdf (1.24 MB) - 16:23, 3 December 2014

• File:PECVD2-SiO2-Recipe-NoAr-250C.pdf (42 KB) - 11:17, 20 August 2012

• File:EVG Plasma Activation Recipe Copying.pdf (580 KB) - 14:15, 9 October 2019

• File:PECVD2-SiO2-Recipe-NoAr-100C.pdf (42 KB) - 11:17, 20 August 2012

• File:PECVD1-SiN-standard recipe 2014.pdf (298 KB) - 14:58, 15 April 2014

• File:51-SiNx-Etch-Recipe-using-RIE3.pdf (1.07 MB) - 15:54, 13 January 2017

• File:PECVD2-SiO2-Recipe-NoAr-50C.pdf (41 KB) - 11:17, 20 August 2012

• File:PECVD1-SiO2-standard recipe 2014.pdf (299 KB) - 15:42, 15 April 2014

• File:PECVD1-SiN-standard recipe 1000A.pdf (295 KB) - 12:08, 20 March 2014

• File:NewPECVD1-SiN-standard recipe 2014.pdf (299 KB) - 14:58, 11 December 2014

• YES Recipe Screenshots: STD-N2-O2
  |[[File:STD-N2-O2-180C-3KW-1min - steps.jpg|alt=screenshot of recipe STD-N2-O2-180C-3KW-1min - steps|none|thumb|STD-N2-O2-180C-3KW-1min - steps]
  725 bytes (147 words) - 12:08, 30 November 2023

• File:SiO2-Etch-Recipe-using-RIE-3-a.pdf (283 KB) - 11:35, 2 August 2016

• PECVD1-SIN Standard Recipe (PlasmaTherm 790)
  ...uBs1GfMrpnXcEdXanZQNko3X0lUcHhVUlNyYnVDUkE&usp=sharing PECVD1-SiN Standard Recipe Spreadsheet]
  174 bytes (20 words) - 15:37, 18 March 2014

• File:PECVD2-SiN-Recipe-5W-250C-High-Stress.pdf (41 KB) - 09:18, 20 August 2012

• File:PECVD2-SiO2-Recipe-100%SiH4-HDR-100C.pdf (42 KB) - 11:20, 20 August 2012

• File:PECVD2-SiN-Recipe-50W-250C-Medium-Stress.pdf (41 KB) - 09:19, 20 August 2012

• File:PECVD2-SiO2-Recipe-100%SiH4-HDR-250C.pdf (42 KB) - 11:20, 20 August 2012

• File:PECVD2-SiN-Recipe-120W-250C-Low-Stress.pdf (41 KB) - 09:20, 20 August 2012

Page text matches

• File:UCSBTEST2 - gain4 for (0.160-1.60)um particles.png Standard recipe for scanning small particles ( 0.160-1.60)um using GAIN4 (1,105 × 765 (1.45 MB)) - 13:40, 26 March 2019

• File:BlueM Instructions.pdf Instructions on operation and recipe editing for the BlueM oven. (221 KB) - 10:30, 8 September 2022

• File:STD-N2-O2-180C-3KW-1min - header.jpg Screenshot of YES recipe - STD-N2-O2-180C-3KW-1min - header (471 × 553 (116 KB)) - 12:03, 30 November 2023

• File:STD-N2-O2-180C-3KW-1min - steps.jpg Screenshot of YES recipe STD-N2-O2-180C-3KW-1min - steps (639 × 553 (118 KB)) - 12:05, 30 November 2023

• PECVD1 Wafer Coating Process
  #* Load the seasoning recipe (SiN seasoning), and run it. The goal of this step is to coat chamber walls #* Load the deposition recipe (SiN@250C), and run it. Deposition time is variable. Get the rate from [htt
  2 KB (270 words) - 13:16, 10 December 2020
• OLD - PECVD2 Recipes
  *[[media:NewAdvPECVD OXIDE 300C standard recipe.pdf|Oxide Standard Recipe]] *[[media:NewAdvPECVD-Nitride2 300C standard recipe.pdf|Nitride2 Standard Recipe]]
  1 KB (189 words) - 12:28, 3 March 2022
• Wafer Coating Process Traveler
  #*Load the seasoning recipe (STD SiO2), and run it. The goal of this step is to coat oxide on chamber w #*Load the deposition recipe (STD SiO2), and run it. Deposition time is variable. Get the rate from [htt
  3 KB (416 words) - 16:54, 22 April 2020

• File:Au oxidation by O2-N2 ash.jpg In high oxidation environment, in this case by O2/N2 mixture recipe, gold surface can oxidize as shown by the XPS data. (1,388 × 697 (124 KB)) - 16:17, 9 June 2023

• RIE Etching Recipes
  *[//wiki.nanotech.ucsb.edu/w/images/b/b4/ZnS_Plasma_Etch-1.pdf ZnS Etch Recipe - CH₄-H₂-Ar] ....edu/w/images/2/2f/SiO2-Etch-Recipe-using-RIE-3-a.pdf SiO₂ Etch Recipe with a very low surface damage - CHF<sub>3]
  2 KB (253 words) - 10:02, 14 June 2021
• Wafer Coating Process Traveler1
  * Seasoning recipe name: '''SiO2 seasoning''', '''t=2min''' * Deposition recipe name: '''SiO2 LDR 250°C, t=780 sec'''
  4 KB (711 words) - 13:32, 30 March 2020
• RIE5 - Standard Operating procedure (Cortex Software)
  # Choose a recipe to run from the '''Recipe''' menu list. # Choose a recipe to run from the list of available recipes.
  2 KB (377 words) - 14:09, 17 October 2018
• PECVD Recipes
  ...E_917R6jF_K-btCHjsiIM/edit#gid= SiO₂<nowiki> [PECVD 1] Standard Recipe</nowiki>] ...VYcMxHRKE/edit#gid= Si₃N₄<nowiki> [PECVD 1] Standard Recipe</nowiki>]
  15 KB (2,272 words) - 15:27, 4 June 2024
• Logitech WBS7 - Procedure for Wax Mounting with Spin-On Crystalbond
  * Set up POLOS recipe * Run recipe:
  823 bytes (131 words) - 08:12, 11 August 2020
• CDE ResMap Quick-Start instructions
  ...as location - 800px annot quarterwf.png|none|thumb|200x200px|Quarter Wafer recipe measurement location]] # Select Operator > Run Recipe
  1 KB (214 words) - 13:01, 17 April 2018
• Unaxis wafer coating procedure
  ...of Dec. 2019), users may '''only edit <u>Deposition Time</u>''', no other recipe modifications or customizations are permitted without staff approval. * Seasoning recipe name: '''SiO2 seasoning''', '''t=2min'''
  5 KB (801 words) - 21:29, 12 August 2020
• Atomic Layer Deposition Recipes
  ...ction. This Ozone-generator must be manually turned on before running the recipe - check with [[Atomic Layer Deposition (Oxford FlexAL)|supervisor]] for det For some recipes such as TiN, there are two loops in the recipe. The outermost loop controls the total thickness of the film, the inner lo
  7 KB (1,104 words) - 10:27, 15 June 2023
• Wafer Scanning process Traveler
  ...BTEST1 (for scanning 8” wafers) and UCSBTEST2 (for scanning 4"wafers). The recipe UCSBTEST2 is used as a template to create other two standard recipes: "UCSB #** (Recipe "UCSBTEST2" is used as a template to create recipes UCSB Gain2 and UCSB Gai
  2 KB (339 words) - 11:31, 22 April 2020
• Wafer Scanning/Coating Process Traveler ( combined/less detailed)
  * Example of how to run process for the standard recipe "SiO2 LDR 250°C" ** Load seasoning recipe " SiO2 seasoning" , time=2min
  3 KB (515 words) - 13:41, 20 April 2020
• Old Deposition Data - NastaziaM 2021-11-22
  * SiO₂ [PECVD 1] Standard Recipe * Si₃N₄ [PECVD 1] Standard Recipe
  36 KB (5,386 words) - 09:31, 14 December 2021
• S-Cubed Flexi - Operating Procedure
  ...k if hot plates are set to the needs temperatures. If not, run Temp-change recipe: #run recipe: Staff>SET-<HP#>-<TEMP> recipe corresponding to needed temp.
  2 KB (396 words) - 14:39, 8 November 2022

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