User contributions for Zwarburg
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21 August 2012
- 14:5714:57, 21 August 2012 diff hist 0 Lithography Recipes No edit summary
- 14:5714:57, 21 August 2012 diff hist 0 Template:LithRecipe Table No edit summary
- 14:5614:56, 21 August 2012 diff hist +229 Template:LithRecipe Table No edit summary
- 14:5514:55, 21 August 2012 diff hist +113 N E-Beam Lithography Recipes Created page with "{{recipes|Lithography}} =Field Emission SEM 1 (FEI Sirion)= =E-Beam Lithography System (JEOL JBX-6300FS)="
- 14:5414:54, 21 August 2012 diff hist +46 N Flood Exposure Recipes Created page with "{{recipes|Lithography}} =DUV Flood Expose=" current
- 14:5314:53, 21 August 2012 diff hist +155 Template:LithRecipe Table No edit summary
- 14:5214:52, 21 August 2012 diff hist +108 N Stepper Recipes Created page with "{{recipes|Lithography}} =Stepper 1 (GCA 6300)= =Stepper 2 (AutoStep 200)= =Stepper 3 (ASML DUV)="
- 14:5114:51, 21 August 2012 diff hist +126 Template:LithRecipe Table No edit summary
- 14:4914:49, 21 August 2012 diff hist +90 N Contact Alignment Recipes Created page with "{{recipes|Lithography}} =Suss Aligners (SUSS MJB-3)= =Contact Aligner (SUSS MA-6)="
- 14:4714:47, 21 August 2012 diff hist +6,717 Lithography Recipes No edit summary
- 14:4114:41, 21 August 2012 diff hist +371 N Template:LithRecipe Table Created page with "| width="65" bgcolor="#DAF1FF" | MLB-3 | width="65" bgcolor="#DAF1FF" | MA-6 | width="65" bgcolor="#DAF1FF" | GCA 6300 | width="65" bgcolor="#DAF1FF" | [[GCA Autos…"
- 14:3414:34, 21 August 2012 diff hist 0 N File:E-Beam-4-Operating-Procedures.pdf No edit summary current
- 14:3314:33, 21 August 2012 diff hist +83 E-Beam 4 (CHA) No edit summary
20 August 2012
- 20:1620:16, 20 August 2012 diff hist +48 Dry Etching Recipes No edit summary
- 20:1620:16, 20 August 2012 diff hist +28 ICP Etching Recipes No edit summary
- 20:1520:15, 20 August 2012 diff hist +24 ICP Etching Recipes →SiO Vertical Etch
- 20:1220:12, 20 August 2012 diff hist 0 N File:UNAXIS-VLR-InP-Etch-Ar-200C-Recipe.pdf No edit summary current
- 20:1220:12, 20 August 2012 diff hist +236 ICP Etching Recipes →ICP-Etch (Unaxis VLR)
- 20:1020:10, 20 August 2012 diff hist 0 N File:UNAXIS-VLR-InP-Etch-200C-Recipe.pdf No edit summary current
- 18:4918:49, 20 August 2012 diff hist +49 Vacuum Deposition Recipes No edit summary
- 18:2218:22, 20 August 2012 diff hist +1,203 PECVD Recipes →SiO2 deposition (Unaxis VLR)
- 18:2118:21, 20 August 2012 diff hist 0 N File:PECVD2-SiO2-Recipe-100%SiH4-LDR-250C.pdf No edit summary current
- 18:2118:21, 20 August 2012 diff hist 0 N File:PECVD2-SiO2-Recipe-100%SiH4-LDR-100C.pdf No edit summary current
- 18:2118:21, 20 August 2012 diff hist 0 N File:PECVD2-SiO2-Recipe-100%SiH4-LDR-50C.pdf No edit summary current
- 18:2018:20, 20 August 2012 diff hist 0 N File:PECVD2-SiO2-Recipe-100%SiH4-HDR-250C.pdf No edit summary current
- 18:2018:20, 20 August 2012 diff hist 0 N File:PECVD2-SiO2-Recipe-100%SiH4-HDR-100C.pdf No edit summary current
- 18:2018:20, 20 August 2012 diff hist 0 N File:PECVD2-SiO2-Recipe-100%SiH4-HDR-50C.pdf No edit summary current
- 18:1818:18, 20 August 2012 diff hist +1,188 PECVD Recipes →ICP-PECVD (Unaxis VLR)
- 18:1718:17, 20 August 2012 diff hist 0 N File:PECVD2-SiO2-Recipe-NoAr-50C.pdf No edit summary current
- 18:1718:17, 20 August 2012 diff hist 0 N File:PECVD2-SiO2-Recipe-NoAr-100C.pdf No edit summary current
- 18:1718:17, 20 August 2012 diff hist 0 N File:PECVD2-SiO2-Recipe-NoAr-250C.pdf No edit summary current
- 18:1218:12, 20 August 2012 diff hist 0 N File:PECVD2-SiO2-Recipe-5W-250C.pdf No edit summary current
- 18:1218:12, 20 August 2012 diff hist 0 N File:PECVD2-SiO2-Recipe-5W-100C.pdf No edit summary current
- 18:1218:12, 20 August 2012 diff hist 0 N File:PECVD2-SiO2-Recipe-5W-50C.pdf No edit summary current
- 18:1118:11, 20 August 2012 diff hist 0 N File:Holograph.jpg No edit summary current
- 16:4316:43, 20 August 2012 diff hist +432 PECVD Recipes →SiN deposition (Unaxis VLR)
- 16:4116:41, 20 August 2012 diff hist +216 PECVD Recipes →SiN (2% SiH4)
- 16:3716:37, 20 August 2012 diff hist 0 N File:PECVD2-SiN-Recipe-NoAr-ExtraN2-120W-250C-Low-Stress.pdf No edit summary current
- 16:3716:37, 20 August 2012 diff hist 0 N File:PECVD2-SiN-Recipe-NoAr-ExtraN2-120W-100C-Low-Stress.pdf No edit summary current
- 16:3716:37, 20 August 2012 diff hist 0 N File:PECVD2-SiN-Recipe-NoAr-ExtraN2-120W-50C-Low-Stress.pdf No edit summary current
- 16:3616:36, 20 August 2012 diff hist +517 PECVD Recipes →SiN (2% SiH4 - No-Ar)
- 16:3316:33, 20 August 2012 diff hist 0 N File:PECVD2-SiN-Recipe-NoAr-120W-250C-Low-Stress.pdf No edit summary current
- 16:3316:33, 20 August 2012 diff hist 0 N File:PECVD2-SiN-Recipe-NoAr-50W-250C-Medium-Stress.pdf No edit summary current
- 16:3216:32, 20 August 2012 diff hist 0 N File:PECVD2-SiN-Recipe-NoAr-5W-250C-High-Stress.pdf No edit summary current
- 16:3216:32, 20 August 2012 diff hist 0 N File:PECVD2-SiN-Recipe-NoAr-120W-100C-Low-Stress.pdf No edit summary current
- 16:3216:32, 20 August 2012 diff hist 0 N File:PECVD2-SiN-Recipe-NoAr-50W-100C-Medium-Stress.pdf No edit summary current
- 16:3216:32, 20 August 2012 diff hist 0 N File:PECVD2-SiN-Recipe-NoAr-5W-100C-High-Stress.pdf No edit summary current
- 16:3216:32, 20 August 2012 diff hist 0 N File:PECVD2-SiN-Recipe-NoAr-120W-50C-Low-Stress.pdf No edit summary current
- 16:3216:32, 20 August 2012 diff hist 0 N File:PECVD2-SiN-Recipe-NoAr-50W-50C-Medium-Stress.pdf No edit summary current
- 16:3116:31, 20 August 2012 diff hist 0 N File:PECVD2-SiN-Recipe-NoAr-5W-50C-High-Stress.pdf No edit summary current
