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Combined display of all available logs of UCSB Nanofab Wiki. You can narrow down the view by selecting a log type, the username (case-sensitive), or the affected page (also case-sensitive).
- 17:00, 13 March 2014 Biljana talk contribs uploaded File:PECVD1-SiN Calibration-February 2014.pdf
- 16:37, 13 March 2014 Biljana talk contribs uploaded File:PECVD1-SiN data.pdf
- 00:09, 13 March 2014 Biljana talk contribs uploaded File:PECVD1 SiN data-February 2014 AFM roughness.pdf
- 23:53, 12 March 2014 Biljana talk contribs uploaded File:PECVD1-PECVD SIN data-February 2014 SiN Index,dep.rates,stress.pdf
- 16:55, 11 September 2013 Biljana talk contribs uploaded File:PECVD1-WIKI PECVD SiN Index, dep.rates, stress.pdf
- 16:53, 11 September 2013 Biljana talk contribs uploaded File:WIKI PECVD SIN Index,dep.rates,stress.pdf
- 18:01, 21 August 2013 Biljana talk contribs deleted page File:Panasonic1-SiO-Etch-SEM.pdf (Deleted old revision 20130821175255!Panasonic1-SiO-Etch-SEM.pdf)
- 18:00, 21 August 2013 Biljana talk contribs uploaded a new version of File:Panasonic1-SiO-Etch-SEM.pdf
- 17:52, 21 August 2013 Biljana talk contribs uploaded a new version of File:Panasonic1-SiO-Etch-SEM.pdf
- 17:45, 21 August 2013 Biljana talk contribs uploaded File:Panasonic1-SiO-Etch-SEM.pdf
- 23:54, 20 August 2013 Biljana talk contribs uploaded File:Standard recipe SiO2-PECVD.pdf
- 23:54, 20 August 2013 Biljana talk contribs uploaded File:Standard recipe SiN-PECVD.pdf
- 23:38, 20 August 2013 Biljana talk contribs uploaded File:Gas Change CF4-SF6-CF4.pdf
- 23:36, 20 August 2013 Biljana talk contribs uploaded File:Gas Change CHF3-Ar-3.pdf
- 23:04, 10 October 2012 Biljana talk contribs uploaded File:SEM pictures SiO2 100C.pdf
- 23:00, 10 October 2012 Biljana talk contribs uploaded File:SiO2 film Unaxis ICP vs PECVD I.pdf
- 22:52, 10 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2Recipe-5W-250C.pdf
- 22:52, 10 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2Recipe-5W-100C.pdf
- 22:52, 10 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2Recipe-5W-50C.pdf
- 23:53, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-high stress-SEM-2% SiH4-100C-5W.pdf
- 23:48, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-medium stress-SEM-2% SiH4-100C-50W.pdf
- 23:36, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx -SEM-2% SiH4-100C-50W.pdf
- 23:14, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-medium-Comparison table-2% SiH4-100C-120W.pdf
- 23:11, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-m.s.-Comparison table-2% SiH4-100C-120W.pdf
- 23:09, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx -h.s.-Comparison table-2% SiH4-100C-120W.pdf
- 23:09, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx -m.s.-Comparison table-2% SiH4-100C-120W.pdf
- 23:08, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-l.s.-Comparison table-2% SiH4-100C-120W.pdf
- 22:56, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx Comparison table-2% SiH4-250C-120W.pdf
- 22:55, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx Comparison table-2% SiH4-100C-120W.pdf
- 22:49, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNxComparison table-2% SiH4-250C-120W.pdf
- 22:48, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNxComparison table-2% SiH4-100C-120W.pdf
- 22:38, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-Comparison table-2% SiH4-250C-120W.pdf
- 22:36, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiNx-Comparison table-2% SiH4-100C-120W.pdf
- 20:50, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2-HDR-100% SiH4.pdf
- 20:46, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2-SEM-LDR SiO2-100% SiH4-100C-15W.pdf
- 20:41, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiO2-LDR-100% SiH4.pdf
- 19:17, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-SEM- Medium stres SiNx-100% SiH4-120W-100C.pdf
- 19:12, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Table-Low stres SiNx-100% SiH4-120W-100C.pdf
- 19:06, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Medium stress SiNx-100% SiH4-120W-250C.pdf
- 19:05, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Medium stres SiNx-100% SiH4-120W-100C.pdf
- 19:05, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Medium stress SiNx-100%SiH4-120W-50C.pdf
- 19:00, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Low stress SiNx-100% SiH4-120W-250C.pdf
- 18:59, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Low stres SiNx-100% SiH4-120W-100C.pdf
- 18:55, 3 October 2012 Biljana talk contribs uploaded File:PECVD2-SiN-Recipe-Low stress SiNx-100%SiH4-120W-50C.pdf
- 23:51, 5 September 2012 Biljana talk contribs uploaded File:IBD template.pdf
- 23:38, 5 September 2012 Biljana talk contribs uploaded File:IBD film data.pdf
- 23:33, 5 September 2012 Biljana talk contribs uploaded File:IBD SiN recipe details.pdf
- 23:33, 5 September 2012 Biljana talk contribs uploaded File:IBD materials table.pdf
- 23:28, 5 September 2012 Biljana talk contribs uploaded File:SiNrecipedetails.pdf
- 23:22, 5 September 2012 Biljana talk contribs uploaded File:SiNfilm.pdf