User contributions for Biljana

2 January 2019

• 21:1321:13, 2 January 2019 diff hist −140 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
• 21:1121:11, 2 January 2019 diff hist −7 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
• 21:0521:05, 2 January 2019 diff hist 0 N File:STD LSNitride2 recipe new info 1-2-2019 Dep.recipe.pdf No edit summary

27 December 2018

• 17:3217:32, 27 December 2018 diff hist 0 File:STD LSNitride2 recipe new info.pdf Biljana uploaded a new version of File:STD LSNitride2 recipe new info.pdf current
• 17:2917:29, 27 December 2018 diff hist 0 N File:STD LSNitride2 recipe new info.pdf No edit summary
• 17:0417:04, 27 December 2018 diff hist +125 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)

26 December 2018

• 21:2021:20, 26 December 2018 diff hist −1 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
• 21:1921:19, 26 December 2018 diff hist +16 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
• 21:1721:17, 26 December 2018 diff hist +134 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
• 21:1621:16, 26 December 2018 diff hist +72 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)

17 December 2018

• 18:1218:12, 17 December 2018 diff hist +7 N Stepper 2 (AutoStep 200) - Operating Procedure - Piece Parts tesing page creation current Tag: Visual edit

27 April 2018

• 14:3414:34, 27 April 2018 diff hist 0 PECVD Recipes SiO2 dat for 300nm film 2017 Tag: Visual edit

16 February 2018

• 17:4517:45, 16 February 2018 diff hist −244 Sputtering Recipes →Al2O3 deposition (IBD)
• 17:4117:41, 16 February 2018 diff hist +130 Sputtering Recipes →Al2O3 deposition (IBD)
• 17:4017:40, 16 February 2018 diff hist +1 Sputtering Recipes →Al2O3 deposition (IBD)
• 17:3917:39, 16 February 2018 diff hist +114 Sputtering Recipes →Al2O3 deposition (IBD)

9 February 2018

• 23:0223:02, 9 February 2018 diff hist +2 PECVD Recipes →SiO2 deposition (PECVD #1)
• 23:0123:01, 9 February 2018 diff hist +289 PECVD Recipes →SiO2 deposition (PECVD #1)
• 23:0023:00, 9 February 2018 diff hist +141 PECVD Recipes →SiN deposition (PECVD #1)
• 22:5922:59, 9 February 2018 diff hist +125 PECVD Recipes →PECVD 1 (PlasmaTherm 790)
• 22:5722:57, 9 February 2018 diff hist +20 PECVD Recipes →PECVD 1 (PlasmaTherm 790)
• 22:5622:56, 9 February 2018 diff hist −1 PECVD Recipes →PECVD 1 (PlasmaTherm 790)
• 22:5522:55, 9 February 2018 diff hist +103 PECVD Recipes →PECVD 1 (PlasmaTherm 790)
• 21:2321:23, 9 February 2018 diff hist +140 PECVD Recipes →PECVD 2 (Advanced Vacuum)
• 21:2221:22, 9 February 2018 diff hist −18 PECVD Recipes →PECVD 2 (Advanced Vacuum)
• 21:2021:20, 9 February 2018 diff hist +259 PECVD Recipes →SiO2 deposition (PECVD #2)
• 21:1921:19, 9 February 2018 diff hist +1 PECVD Recipes →SiN deposition (PECVD #2)
• 21:1621:16, 9 February 2018 diff hist +8 PECVD Recipes →SiN deposition (PECVD #2)
• 21:1521:15, 9 February 2018 diff hist +255 PECVD Recipes →SiN deposition (PECVD #2)
• 21:1321:13, 9 February 2018 diff hist +142 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
• 21:1121:11, 9 February 2018 diff hist +1 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
• 21:1121:11, 9 February 2018 diff hist −1 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
• 21:0821:08, 9 February 2018 diff hist +8 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
• 21:0821:08, 9 February 2018 diff hist −10 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
• 21:0721:07, 9 February 2018 diff hist +129 PECVD Recipes →PECVD 2 (Advanced Vacuum)

5 December 2017

• 22:2022:20, 5 December 2017 diff hist +27 Sputtering Recipes →Al2O3 deposition (IBD) Tag: Visual edit
• 22:1922:19, 5 December 2017 diff hist +302 Sputtering Recipes →Al2O3 deposition (IBD)
• 22:1322:13, 5 December 2017 diff hist −11 Sputtering Recipes →Al2O3 deposition (IBD) Tag: Visual edit: Switched
• 22:1122:11, 5 December 2017 diff hist +155 Sputtering Recipes →Al2O3 deposition (IBD) Tag: Visual edit
• 22:0622:06, 5 December 2017 diff hist +154 Sputtering Recipes →Ion Beam Deposition (Veeco NEXUS) Tag: Visual edit

20 October 2017

• 15:5215:52, 20 October 2017 diff hist 0 N File:New AdvPECVD-LS Nitride2 300C standard recipe LS Nitride2 standard recipe.pdf No edit summary current
• 15:5215:52, 20 October 2017 diff hist +4 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
• 15:4815:48, 20 October 2017 diff hist +26 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
• 15:4315:43, 20 October 2017 diff hist 0 File:AdvPECVD-LS Nitride2 300C standard recipe LS Nitride2 standard recipe.pdf Biljana uploaded a new version of File:AdvPECVD-LS Nitride2 300C standard recipe LS Nitride2 standard recipe.pdf current
• 15:4215:42, 20 October 2017 diff hist 0 N File:AdvPECVD-LS Nitride2 300C standard recipe LS Nitride2 standard recipe.pdf No edit summary

26 September 2017

• 21:0021:00, 26 September 2017 diff hist +182 PECVD Recipes No edit summary Tag: Visual edit
• 20:4620:46, 26 September 2017 diff hist +27 PECVD Recipes →PECVD 1 (PlasmaTherm 790)
• 20:4520:45, 26 September 2017 diff hist −2 PECVD Recipes →PECVD 2 (Advanced Vacuum)
• 20:4420:44, 26 September 2017 diff hist 0 PECVD Recipes →PECVD 2 (Advanced Vacuum)
• 20:4420:44, 26 September 2017 diff hist +35 PECVD Recipes →PECVD 2 (Advanced Vacuum)