User contributions for Biljana

27 February 2020

• 22:1922:19, 27 February 2020 diff hist +261 PECVD Recipes →SiO2 deposition (Unaxis VLR)
• 22:1822:18, 27 February 2020 diff hist +134 PECVD Recipes →SiO2 deposition (Unaxis VLR)
• 22:1722:17, 27 February 2020 diff hist +136 PECVD Recipes →SiO2 deposition (Unaxis VLR)
• 20:2320:23, 27 February 2020 diff hist +1 PECVD Recipes →SiN deposition (Unaxis VLR)
• 20:2320:23, 27 February 2020 diff hist +4 PECVD Recipes →SiN deposition (Unaxis VLR)
• 20:2220:22, 27 February 2020 diff hist −1 PECVD Recipes →SiO2 deposition (Unaxis VLR)

6 February 2020

• 22:0022:00, 6 February 2020 diff hist +3 PECVD Recipes →SiO2 deposition (PECVD #1)
• 22:0022:00, 6 February 2020 diff hist +9 PECVD Recipes →SiN deposition (PECVD #1)
• 21:5921:59, 6 February 2020 diff hist +97 PECVD Recipes →SiN deposition (PECVD #1)
• 21:5821:58, 6 February 2020 diff hist +1 PECVD Recipes →SiO2 deposition (PECVD #1)
• 21:5821:58, 6 February 2020 diff hist +100 PECVD Recipes →SiO2 deposition (PECVD #1)
• 21:5521:55, 6 February 2020 diff hist −9 PECVD Recipes →Standard Recipe
• 21:5321:53, 6 February 2020 diff hist +1 PECVD Recipes →Standard Recipe
• 21:5321:53, 6 February 2020 diff hist +110 PECVD Recipes →Standard Recipe
• 21:5221:52, 6 February 2020 diff hist +1 PECVD Recipes →Standard Recipe
• 21:5121:51, 6 February 2020 diff hist +113 PECVD Recipes →SiN deposition (PECVD #2)
• 21:4921:49, 6 February 2020 diff hist −141 PECVD Recipes →Standard Recipe
• 21:4821:48, 6 February 2020 diff hist +107 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
• 21:4621:46, 6 February 2020 diff hist −1 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
• 21:4621:46, 6 February 2020 diff hist +2 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
• 21:4521:45, 6 February 2020 diff hist +141 PECVD Recipes →Standard Recipe

30 January 2020

• 21:0321:03, 30 January 2020 diff hist +11 PECVD Recipes →SiN deposition (Unaxis VLR)
• 21:0221:02, 30 January 2020 diff hist +156 PECVD Recipes →SiN deposition (Unaxis VLR)
• 21:0121:01, 30 January 2020 diff hist +129 PECVD Recipes →SiN deposition (Unaxis VLR)

14 January 2020

• 20:2620:26, 14 January 2020 diff hist +139 PECVD Recipes →PECVD 2 (Advanced Vacuum)
• 20:2520:25, 14 January 2020 diff hist +142 PECVD Recipes →Uniformity Data
• 20:2520:25, 14 January 2020 diff hist +126 PECVD Recipes →Thin-Film Properties
• 20:2420:24, 14 January 2020 diff hist +139 PECVD Recipes →Uniformity Data
• 20:2320:23, 14 January 2020 diff hist +129 PECVD Recipes →SiN deposition (PECVD #2)
• 20:2220:22, 14 January 2020 diff hist +136 PECVD Recipes →Uniformity Data
• 20:2120:21, 14 January 2020 diff hist +126 PECVD Recipes →SiO2 deposition (PECVD #2)
• 20:1720:17, 14 January 2020 diff hist +139 PECVD Recipes →Historical Particulate Data
• 20:1620:16, 14 January 2020 diff hist +152 PECVD Recipes →Uniformity Data
• 20:1520:15, 14 January 2020 diff hist +140 PECVD Recipes →Uniformity Data
• 20:1220:12, 14 January 2020 diff hist +124 PECVD Recipes →SiN deposition (PECVD #1)
• 20:0920:09, 14 January 2020 diff hist +136 PECVD Recipes →SiO2 deposition (PECVD #1)

13 December 2019

• 21:3921:39, 13 December 2019 diff hist +3 PECVD Recipes →ICP-PECVD (Unaxis VLR)
• 21:3921:39, 13 December 2019 diff hist +144 PECVD Recipes →ICP-PECVD (Unaxis VLR)
• 21:3521:35, 13 December 2019 diff hist +131 PECVD Recipes →SiN deposition (Unaxis VLR)

12 December 2019

• 21:0021:00, 12 December 2019 diff hist +2 PECVD Recipes →SiO2 deposition (PECVD #2)
• 20:5920:59, 12 December 2019 diff hist +1 PECVD Recipes →Low-Stress SiN deposition (PECVD #2)
• 20:5920:59, 12 December 2019 diff hist +1 PECVD Recipes →SiN deposition (PECVD #2)
• 20:5720:57, 12 December 2019 diff hist +18 PECVD Recipes →PECVD 1 (PlasmaTherm 790)
• 20:5620:56, 12 December 2019 diff hist −2 PECVD Recipes →PECVD 1 (PlasmaTherm 790)
• 20:5620:56, 12 December 2019 diff hist +6 PECVD Recipes →PECVD 1 (PlasmaTherm 790)
• 20:5420:54, 12 December 2019 diff hist +140 PECVD Recipes →PECVD 1 (PlasmaTherm 790)
• 20:4220:42, 12 December 2019 diff hist −138 PECVD Recipes →PECVD 2 (Advanced Vacuum)
• 20:4120:41, 12 December 2019 diff hist +139 PECVD Recipes →PECVD 2 (Advanced Vacuum)
• 20:3820:38, 12 December 2019 diff hist −3 PECVD Recipes →SiO2 deposition (Unaxis VLR)
• 20:3820:38, 12 December 2019 diff hist 0 PECVD Recipes →SiO2 deposition (Unaxis VLR)