User contributions for Biljana
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21 April 2020
- 17:0917:09, 21 April 2020 diff hist +80 PECVD Recipes →Standard Recipe: New LS Nitride 2 recipe Tag: Visual edit
- 17:0817:08, 21 April 2020 diff hist 0 N File:Adv. PECVD2- STD LSNitride2.xlsx No edit summary current
- 17:0717:07, 21 April 2020 diff hist +24 PECVD Recipes →Standard Recipe: STD New version of the recipe Tag: Visual edit
- 17:0617:06, 21 April 2020 diff hist +78 PECVD Recipes →Standard Recipe Tag: Visual edit
- 17:0517:05, 21 April 2020 diff hist 0 N File:Adv. PECVD2- STD Nitride2.xlsx No edit summary current
- 17:0517:05, 21 April 2020 diff hist +21 PECVD Recipes →SiN deposition (PECVD #2): STD Nitride recipe new version Tag: Visual edit
- 17:0417:04, 21 April 2020 diff hist −9 PECVD Recipes →Standard Recipe Tag: Visual edit
- 17:0317:03, 21 April 2020 diff hist +73 PECVD Recipes →SiO2 deposition (PECVD #2) Tag: Visual edit
- 17:0217:02, 21 April 2020 diff hist +26 PECVD Recipes →Standard Recipe Tag: Visual edit
- 17:0017:00, 21 April 2020 diff hist −241 PECVD Recipes →Standard Recipe Tag: Visual edit
- 16:5916:59, 21 April 2020 diff hist −90 PECVD Recipes →Standard Recipe Tag: Visual edit
- 16:5816:58, 21 April 2020 diff hist −1 PECVD Recipes →Standard Recipe Tag: Visual edit
- 16:5716:57, 21 April 2020 diff hist +73 PECVD Recipes →Standard Recipe Tag: Visual edit
- 16:5716:57, 21 April 2020 diff hist −93 PECVD Recipes →Standard Recipe: Updated recipe for STD SiO2 Tag: Visual edit
- 16:5516:55, 21 April 2020 diff hist +9 PECVD Recipes →Standard Recipe: updated recipe for STD SiO2 Tag: Visual edit
- 16:5416:54, 21 April 2020 diff hist 0 N File:Adv. PECVD2-STD SiO2.xlsx No edit summary
20 April 2020
- 21:1021:10, 20 April 2020 diff hist −181 PECVD Recipes →SiO2 250C Data 2019: recipe cleanup Tag: Visual edit
- 20:5220:52, 20 April 2020 diff hist +24 PECVD Recipes →SiN deposition (Unaxis VLR): change in name of recipe Tag: Visual edit
- 20:4920:49, 20 April 2020 diff hist −855 PECVD Recipes →SiO2 deposition (Unaxis VLR): deleting some recipes Tag: Visual edit
- 20:4120:41, 20 April 2020 diff hist +123 Wafer Scanning/Coating Process Traveler ( combined/less detailed) →Run on "real wafer" current Tag: Visual edit
- 20:3220:32, 20 April 2020 diff hist −132 Wafer Scanning/Coating Process Traveler ( combined/less detailed) corrections on unaxis scan Tag: Visual edit
- 18:2818:28, 20 April 2020 diff hist −6 Wafer Scanning/Coating Process Traveler ( combined/less detailed) →Scan After process calibration Tag: Visual edit
- 18:2818:28, 20 April 2020 diff hist +7 Wafer Scanning/Coating Process Traveler ( combined/less detailed) →Scan Before Deposition Tag: Visual edit
- 18:2718:27, 20 April 2020 diff hist +3,040 Wafer Scanning/Coating Process Traveler ( combined/less detailed) →Scan before process calibration Tag: Visual edit
- 17:3917:39, 20 April 2020 diff hist +330 Wafer Scanning/Coating Process Traveler ( combined/less detailed) No edit summary Tag: Visual edit
- 17:1217:12, 20 April 2020 diff hist +7 N Wafer Scanning/Coating Process Traveler ( combined/less detailed) wip Tag: Visual edit
- 17:1117:11, 20 April 2020 diff hist +4 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 17:1117:11, 20 April 2020 diff hist +113 ICP-PECVD (Unaxis VLR) →Documentation: scan/coat Tag: Visual edit
- 17:0317:03, 20 April 2020 diff hist +44 PECVD Recipes →" Post-Dep Clean" recipe Tag: Visual edit
- 17:0117:01, 20 April 2020 diff hist −650 PECVD Recipes →SiN deposition (Unaxis VLR) Tag: Visual edit
- 16:3616:36, 20 April 2020 diff hist +1,374 Wafer Scanning process Traveler scanning wafers Tag: Visual edit
- 16:2016:20, 20 April 2020 diff hist +2,131 N Wafer Scanning process Traveler Scanning wafers Tag: Visual edit
- 15:1315:13, 20 April 2020 diff hist +4 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 15:1115:11, 20 April 2020 diff hist +5 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
- 15:0915:09, 20 April 2020 diff hist +28 ICP-PECVD (Unaxis VLR) →Documentation Tag: Visual edit
15 April 2020
- 21:3621:36, 15 April 2020 diff hist +102 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →First layer Tag: Visual edit
- 21:3621:36, 15 April 2020 diff hist 0 N File:Single centered mask-Piece 1st litho AUTOSTEP 200.pptx No edit summary current
- 21:3521:35, 15 April 2020 diff hist −110 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →First layer Tag: Visual edit
- 21:3221:32, 15 April 2020 diff hist +98 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Single centered mask plate Tag: Visual edit
- 21:3021:30, 15 April 2020 diff hist +4 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Multi layered mask plate Tag: Visual edit
- 21:2821:28, 15 April 2020 diff hist −4 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Multi layered mask plate Tag: Visual edit
- 21:2321:23, 15 April 2020 diff hist +50 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Multi layered mask plate Tag: Visual edit
- 21:2221:22, 15 April 2020 diff hist +102 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Single centered mask plate Tag: Visual edit
- 21:1721:17, 15 April 2020 diff hist +50 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences No edit summary Tag: Visual edit
- 21:1521:15, 15 April 2020 diff hist 0 N File:Single centerd mask- Piece 1st litho AUTOSTEP 200-PIECES.pptx No edit summary current
- 21:1521:15, 15 April 2020 diff hist 0 N File:Single centered mask-Piece 2nd litho AUTOSTEP 200.pptx No edit summary
- 21:1421:14, 15 April 2020 diff hist 0 N File:4 Quads mask plate Piece - 2nd litho AUTOSTEP 200.pptx No edit summary current
- 17:0817:08, 15 April 2020 diff hist +82 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Second layer Tag: Visual edit
- 17:0617:06, 15 April 2020 diff hist +153 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →Second layer Tag: Visual edit
- 17:0217:02, 15 April 2020 diff hist +229 Stepper 2 (Autostep 200) - Piece vs. Wafer Programming Differences →First layer Tag: Visual edit